JPS614146A - 電子線装置 - Google Patents

電子線装置

Info

Publication number
JPS614146A
JPS614146A JP59125746A JP12574684A JPS614146A JP S614146 A JPS614146 A JP S614146A JP 59125746 A JP59125746 A JP 59125746A JP 12574684 A JP12574684 A JP 12574684A JP S614146 A JPS614146 A JP S614146A
Authority
JP
Japan
Prior art keywords
electron beam
objective lens
signal
scanning
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59125746A
Other languages
English (en)
Japanese (ja)
Other versions
JPH035022B2 (enrdf_load_stackoverflow
Inventor
Seiichi Nakagawa
中川　清一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP59125746A priority Critical patent/JPS614146A/ja
Publication of JPS614146A publication Critical patent/JPS614146A/ja
Publication of JPH035022B2 publication Critical patent/JPH035022B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59125746A 1984-06-19 1984-06-19 電子線装置 Granted JPS614146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59125746A JPS614146A (ja) 1984-06-19 1984-06-19 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59125746A JPS614146A (ja) 1984-06-19 1984-06-19 電子線装置

Publications (2)

Publication Number Publication Date
JPS614146A true JPS614146A (ja) 1986-01-10
JPH035022B2 JPH035022B2 (enrdf_load_stackoverflow) 1991-01-24

Family

ID=14917775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59125746A Granted JPS614146A (ja) 1984-06-19 1984-06-19 電子線装置

Country Status (1)

Country Link
JP (1) JPS614146A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0432143A (ja) * 1990-05-25 1992-02-04 Hitachi Ltd 電子線装置
JP2012142299A (ja) * 2012-03-19 2012-07-26 Hitachi High-Technologies Corp 走査型荷電粒子顕微鏡装置および走査型荷電粒子顕微鏡装置で取得した画像の処理方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0432143A (ja) * 1990-05-25 1992-02-04 Hitachi Ltd 電子線装置
JP2012142299A (ja) * 2012-03-19 2012-07-26 Hitachi High-Technologies Corp 走査型荷電粒子顕微鏡装置および走査型荷電粒子顕微鏡装置で取得した画像の処理方法

Also Published As

Publication number Publication date
JPH035022B2 (enrdf_load_stackoverflow) 1991-01-24

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