JPH035022B2 - - Google Patents
Info
- Publication number
- JPH035022B2 JPH035022B2 JP59125746A JP12574684A JPH035022B2 JP H035022 B2 JPH035022 B2 JP H035022B2 JP 59125746 A JP59125746 A JP 59125746A JP 12574684 A JP12574684 A JP 12574684A JP H035022 B2 JPH035022 B2 JP H035022B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- objective lens
- signal
- scanning
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 34
- 230000003321 amplification Effects 0.000 claims description 20
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 20
- 230000005465 channeling Effects 0.000 claims description 8
- 230000004075 alteration Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 12
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59125746A JPS614146A (ja) | 1984-06-19 | 1984-06-19 | 電子線装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59125746A JPS614146A (ja) | 1984-06-19 | 1984-06-19 | 電子線装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS614146A JPS614146A (ja) | 1986-01-10 |
| JPH035022B2 true JPH035022B2 (enrdf_load_stackoverflow) | 1991-01-24 |
Family
ID=14917775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59125746A Granted JPS614146A (ja) | 1984-06-19 | 1984-06-19 | 電子線装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS614146A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0432143A (ja) * | 1990-05-25 | 1992-02-04 | Hitachi Ltd | 電子線装置 |
| JP2012142299A (ja) * | 2012-03-19 | 2012-07-26 | Hitachi High-Technologies Corp | 走査型荷電粒子顕微鏡装置および走査型荷電粒子顕微鏡装置で取得した画像の処理方法 |
-
1984
- 1984-06-19 JP JP59125746A patent/JPS614146A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS614146A (ja) | 1986-01-10 |
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