JPS6140984B2 - - Google Patents

Info

Publication number
JPS6140984B2
JPS6140984B2 JP1978978A JP1978978A JPS6140984B2 JP S6140984 B2 JPS6140984 B2 JP S6140984B2 JP 1978978 A JP1978978 A JP 1978978A JP 1978978 A JP1978978 A JP 1978978A JP S6140984 B2 JPS6140984 B2 JP S6140984B2
Authority
JP
Japan
Prior art keywords
hole
dry plate
glass
photomask
glass dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54114304A (en
Inventor
Masao Kaneko
Keiji Fujikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1978978A priority Critical patent/JPS54114304A/ja
Publication of JPS54114304A publication Critical patent/JPS54114304A/ja
Publication of JPS6140984B2 publication Critical patent/JPS6140984B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1978978A 1978-02-24 1978-02-24 Method of making glass mask Granted JPS54114304A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978978A JPS54114304A (en) 1978-02-24 1978-02-24 Method of making glass mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978978A JPS54114304A (en) 1978-02-24 1978-02-24 Method of making glass mask

Publications (2)

Publication Number Publication Date
JPS54114304A JPS54114304A (en) 1979-09-06
JPS6140984B2 true JPS6140984B2 (OSRAM) 1986-09-12

Family

ID=12009097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978978A Granted JPS54114304A (en) 1978-02-24 1978-02-24 Method of making glass mask

Country Status (1)

Country Link
JP (1) JPS54114304A (OSRAM)

Also Published As

Publication number Publication date
JPS54114304A (en) 1979-09-06

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