JPS6140101B2 - - Google Patents

Info

Publication number
JPS6140101B2
JPS6140101B2 JP9453779A JP9453779A JPS6140101B2 JP S6140101 B2 JPS6140101 B2 JP S6140101B2 JP 9453779 A JP9453779 A JP 9453779A JP 9453779 A JP9453779 A JP 9453779A JP S6140101 B2 JPS6140101 B2 JP S6140101B2
Authority
JP
Japan
Prior art keywords
photomask
pattern
inspected
workbench
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9453779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5619052A (en
Inventor
Masahito Nakajima
Katsumi Fujiwara
Jushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9453779A priority Critical patent/JPS5619052A/ja
Publication of JPS5619052A publication Critical patent/JPS5619052A/ja
Publication of JPS6140101B2 publication Critical patent/JPS6140101B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP9453779A 1979-07-25 1979-07-25 Pattern correcting device Granted JPS5619052A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9453779A JPS5619052A (en) 1979-07-25 1979-07-25 Pattern correcting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9453779A JPS5619052A (en) 1979-07-25 1979-07-25 Pattern correcting device

Publications (2)

Publication Number Publication Date
JPS5619052A JPS5619052A (en) 1981-02-23
JPS6140101B2 true JPS6140101B2 (enrdf_load_stackoverflow) 1986-09-08

Family

ID=14113064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9453779A Granted JPS5619052A (en) 1979-07-25 1979-07-25 Pattern correcting device

Country Status (1)

Country Link
JP (1) JPS5619052A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58112338A (ja) * 1981-12-25 1983-07-04 Matsushita Electronics Corp 半導体荘置用金属導体
JPS5975517A (ja) * 1982-10-22 1984-04-28 三菱電機株式会社 開閉器
JPS58192440U (ja) * 1982-06-15 1983-12-21 三菱電機株式会社 開閉器
JPS58181236A (ja) * 1982-04-15 1983-10-22 三菱電機株式会社 開閉器
JPS58181250A (ja) * 1982-04-15 1983-10-22 三菱電機株式会社 開閉器
JPS58181231A (ja) * 1982-04-15 1983-10-22 三菱電機株式会社 開閉器
JPS5935336A (ja) * 1982-08-21 1984-02-27 三菱電機株式会社 開閉器
JPS5935338A (ja) * 1982-08-21 1984-02-27 三菱電機株式会社 開閉器
JPS5937627A (ja) * 1982-08-26 1984-03-01 三菱電機株式会社 開閉器
JPS5937626A (ja) * 1982-08-26 1984-03-01 三菱電機株式会社 開閉器
JPS5979933A (ja) * 1982-10-28 1984-05-09 三菱電機株式会社 開閉器
JPS5987735A (ja) * 1982-11-10 1984-05-21 三菱電機株式会社 開閉器

Also Published As

Publication number Publication date
JPS5619052A (en) 1981-02-23

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