JPS6139393B2 - - Google Patents

Info

Publication number
JPS6139393B2
JPS6139393B2 JP54035970A JP3597079A JPS6139393B2 JP S6139393 B2 JPS6139393 B2 JP S6139393B2 JP 54035970 A JP54035970 A JP 54035970A JP 3597079 A JP3597079 A JP 3597079A JP S6139393 B2 JPS6139393 B2 JP S6139393B2
Authority
JP
Japan
Prior art keywords
gas
vacuum
plating
metal
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54035970A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55128578A (en
Inventor
Seiji Nishikawa
Heizaburo Furukawa
Daizo Yamazaki
Yoshikyo Nakagawa
Tetsuyoshi Wada
Shigeo Itano
Jusaburo Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP3597079A priority Critical patent/JPS55128578A/ja
Publication of JPS55128578A publication Critical patent/JPS55128578A/ja
Publication of JPS6139393B2 publication Critical patent/JPS6139393B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP3597079A 1979-03-27 1979-03-27 Method and apparatus for vacuum deposition plating of metal Granted JPS55128578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3597079A JPS55128578A (en) 1979-03-27 1979-03-27 Method and apparatus for vacuum deposition plating of metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3597079A JPS55128578A (en) 1979-03-27 1979-03-27 Method and apparatus for vacuum deposition plating of metal

Publications (2)

Publication Number Publication Date
JPS55128578A JPS55128578A (en) 1980-10-04
JPS6139393B2 true JPS6139393B2 (enrdf_load_stackoverflow) 1986-09-03

Family

ID=12456775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3597079A Granted JPS55128578A (en) 1979-03-27 1979-03-27 Method and apparatus for vacuum deposition plating of metal

Country Status (1)

Country Link
JP (1) JPS55128578A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0740828B2 (ja) * 1993-06-29 1995-05-10 井関農機株式会社 コンバインの操作装置
LV13383B (en) * 2004-05-27 2006-02-20 Sidrabe As Method and device for vacuum vaporization metals or alloys
EP1972699A1 (fr) * 2007-03-20 2008-09-24 ArcelorMittal France Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique
CN112323022B (zh) * 2021-01-04 2021-03-19 度亘激光技术（苏州）有限公司 半导体器件的蒸镀方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871321A (enrdf_load_stackoverflow) * 1971-12-28 1973-09-27

Also Published As

Publication number Publication date
JPS55128578A (en) 1980-10-04

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