JPS6138858B2 - - Google Patents

Info

Publication number
JPS6138858B2
JPS6138858B2 JP15744478A JP15744478A JPS6138858B2 JP S6138858 B2 JPS6138858 B2 JP S6138858B2 JP 15744478 A JP15744478 A JP 15744478A JP 15744478 A JP15744478 A JP 15744478A JP S6138858 B2 JPS6138858 B2 JP S6138858B2
Authority
JP
Japan
Prior art keywords
oxide film
film
layer
conductivity type
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15744478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5585041A (en
Inventor
Yasunobu Osa
Tatsumi Shirasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15744478A priority Critical patent/JPS5585041A/ja
Publication of JPS5585041A publication Critical patent/JPS5585041A/ja
Publication of JPS6138858B2 publication Critical patent/JPS6138858B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP15744478A 1978-12-22 1978-12-22 Semiconductor device and its preparation Granted JPS5585041A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15744478A JPS5585041A (en) 1978-12-22 1978-12-22 Semiconductor device and its preparation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15744478A JPS5585041A (en) 1978-12-22 1978-12-22 Semiconductor device and its preparation

Publications (2)

Publication Number Publication Date
JPS5585041A JPS5585041A (en) 1980-06-26
JPS6138858B2 true JPS6138858B2 (en, 2012) 1986-09-01

Family

ID=15649781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15744478A Granted JPS5585041A (en) 1978-12-22 1978-12-22 Semiconductor device and its preparation

Country Status (1)

Country Link
JP (1) JPS5585041A (en, 2012)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110037A (ja) * 1981-12-24 1983-06-30 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
EP0356557B1 (en) * 1988-09-01 1994-12-21 International Business Machines Corporation Thin dielectric layer on a substrate and method for forming such a layer
US5268311A (en) * 1988-09-01 1993-12-07 International Business Machines Corporation Method for forming a thin dielectric layer on a substrate
US5139869A (en) * 1988-09-01 1992-08-18 Wolfgang Euen Thin dielectric layer on a substrate
JP2690468B2 (ja) * 1995-03-24 1997-12-10 株式会社日立製作所 半導体装置

Also Published As

Publication number Publication date
JPS5585041A (en) 1980-06-26

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