JPS6138774Y2 - - Google Patents
Info
- Publication number
- JPS6138774Y2 JPS6138774Y2 JP1982110668U JP11066882U JPS6138774Y2 JP S6138774 Y2 JPS6138774 Y2 JP S6138774Y2 JP 1982110668 U JP1982110668 U JP 1982110668U JP 11066882 U JP11066882 U JP 11066882U JP S6138774 Y2 JPS6138774 Y2 JP S6138774Y2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- processing
- laser
- focusing
- outputs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 31
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000003384 imaging method Methods 0.000 claims description 12
- 230000002238 attenuated effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982110668U JPS5916786U (ja) | 1982-07-20 | 1982-07-20 | 自動焦点レ−ザ加工機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982110668U JPS5916786U (ja) | 1982-07-20 | 1982-07-20 | 自動焦点レ−ザ加工機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5916786U JPS5916786U (ja) | 1984-02-01 |
| JPS6138774Y2 true JPS6138774Y2 (fr) | 1986-11-07 |
Family
ID=30257275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982110668U Granted JPS5916786U (ja) | 1982-07-20 | 1982-07-20 | 自動焦点レ−ザ加工機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5916786U (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2675428B2 (ja) * | 1990-07-24 | 1997-11-12 | 三洋電機株式会社 | 太陽電池装置の製造方法 |
| JP4519352B2 (ja) * | 2001-04-12 | 2010-08-04 | 財団法人神奈川科学技術アカデミー | 微細加工装置 |
| JP5242278B2 (ja) * | 2008-07-29 | 2013-07-24 | 株式会社ディスコ | レーザー加工装置 |
-
1982
- 1982-07-20 JP JP1982110668U patent/JPS5916786U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5916786U (ja) | 1984-02-01 |
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