JPS6138269B2 - - Google Patents

Info

Publication number
JPS6138269B2
JPS6138269B2 JP56022030A JP2203081A JPS6138269B2 JP S6138269 B2 JPS6138269 B2 JP S6138269B2 JP 56022030 A JP56022030 A JP 56022030A JP 2203081 A JP2203081 A JP 2203081A JP S6138269 B2 JPS6138269 B2 JP S6138269B2
Authority
JP
Japan
Prior art keywords
gas
light
film
nozzle
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56022030A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57136931A (en
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suwa Seikosha KK
Original Assignee
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suwa Seikosha KK filed Critical Suwa Seikosha KK
Priority to JP56022030A priority Critical patent/JPS57136931A/ja
Publication of JPS57136931A publication Critical patent/JPS57136931A/ja
Publication of JPS6138269B2 publication Critical patent/JPS6138269B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP56022030A 1981-02-17 1981-02-17 Photochemical reaction device Granted JPS57136931A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56022030A JPS57136931A (en) 1981-02-17 1981-02-17 Photochemical reaction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56022030A JPS57136931A (en) 1981-02-17 1981-02-17 Photochemical reaction device

Publications (2)

Publication Number Publication Date
JPS57136931A JPS57136931A (en) 1982-08-24
JPS6138269B2 true JPS6138269B2 (enExample) 1986-08-28

Family

ID=12071574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56022030A Granted JPS57136931A (en) 1981-02-17 1981-02-17 Photochemical reaction device

Country Status (1)

Country Link
JP (1) JPS57136931A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59194440A (ja) * 1983-04-18 1984-11-05 Mitsubishi Electric Corp パタ−ン形成装置
JPS6063534A (ja) * 1983-09-17 1985-04-11 Mitsubishi Electric Corp 微細加工方法
JPS62238369A (ja) * 1986-04-09 1987-10-19 Nissin Electric Co Ltd 光ｃｖｄ装置
JP2506100B2 (ja) * 1987-02-16 1996-06-12 株式会社東芝 Ｃｖｄ装置

Also Published As

Publication number Publication date
JPS57136931A (en) 1982-08-24

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