JPS6136705B2 - - Google Patents

Info

Publication number
JPS6136705B2
JPS6136705B2 JP54033734A JP3373479A JPS6136705B2 JP S6136705 B2 JPS6136705 B2 JP S6136705B2 JP 54033734 A JP54033734 A JP 54033734A JP 3373479 A JP3373479 A JP 3373479A JP S6136705 B2 JPS6136705 B2 JP S6136705B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
layer
silicon
wiring
inter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54033734A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55125651A (en
Inventor
Mitsutaka Morimoto
Hiroki Muta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3373479A priority Critical patent/JPS55125651A/ja
Publication of JPS55125651A publication Critical patent/JPS55125651A/ja
Publication of JPS6136705B2 publication Critical patent/JPS6136705B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/01—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3373479A 1979-03-22 1979-03-22 Production of semiconductor integrated circuit Granted JPS55125651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3373479A JPS55125651A (en) 1979-03-22 1979-03-22 Production of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3373479A JPS55125651A (en) 1979-03-22 1979-03-22 Production of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS55125651A JPS55125651A (en) 1980-09-27
JPS6136705B2 true JPS6136705B2 (enExample) 1986-08-20

Family

ID=12394627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3373479A Granted JPS55125651A (en) 1979-03-22 1979-03-22 Production of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS55125651A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941870A (ja) * 1982-08-25 1984-03-08 Toshiba Corp 半導体装置の製造方法
JPS5978560A (ja) * 1982-10-26 1984-05-07 Mitsubishi Electric Corp 半導体集積回路装置の製造方法
JPS59149045A (ja) * 1983-02-16 1984-08-25 Nec Corp 半導体装置の製造方法
US4935376A (en) * 1989-10-12 1990-06-19 At&T Bell Laboratories Making silicide gate level runners
US5034348A (en) * 1990-08-16 1991-07-23 International Business Machines Corp. Process for forming refractory metal silicide layers of different thicknesses in an integrated circuit

Also Published As

Publication number Publication date
JPS55125651A (en) 1980-09-27

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