JPS6136704B2 - - Google Patents
Info
- Publication number
- JPS6136704B2 JPS6136704B2 JP3374579A JP3374579A JPS6136704B2 JP S6136704 B2 JPS6136704 B2 JP S6136704B2 JP 3374579 A JP3374579 A JP 3374579A JP 3374579 A JP3374579 A JP 3374579A JP S6136704 B2 JPS6136704 B2 JP S6136704B2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- mark
- camera
- signal
- detection circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000005286 illumination Methods 0.000 claims description 7
- 230000002950 deficient Effects 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 241001061260 Emmelichthys struhsakeri Species 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3374579A JPS55125641A (en) | 1979-03-22 | 1979-03-22 | Automatic chip selection apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3374579A JPS55125641A (en) | 1979-03-22 | 1979-03-22 | Automatic chip selection apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55125641A JPS55125641A (en) | 1980-09-27 |
JPS6136704B2 true JPS6136704B2 (de) | 1986-08-20 |
Family
ID=12394945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3374579A Granted JPS55125641A (en) | 1979-03-22 | 1979-03-22 | Automatic chip selection apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55125641A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007258482A (ja) * | 2006-03-23 | 2007-10-04 | Fujitsu Ltd | 半導体装置の検査装置及び検査方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5897844A (ja) * | 1981-12-07 | 1983-06-10 | Shinkawa Ltd | ダイ詰め換え装置 |
JPS58165339A (ja) * | 1982-03-26 | 1983-09-30 | Nec Corp | 半導体ペレツトのマウント方法及びその装置 |
JPS59211239A (ja) * | 1983-05-17 | 1984-11-30 | Nec Corp | 半導体ペレツト配列機 |
JPS6127652A (ja) * | 1984-07-18 | 1986-02-07 | Shinkawa Ltd | ウエハ位置決め装置 |
SG148902A1 (en) * | 2007-07-09 | 2009-01-29 | Generic Power Pte Ltd | Die ejector with illuminating unit |
-
1979
- 1979-03-22 JP JP3374579A patent/JPS55125641A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007258482A (ja) * | 2006-03-23 | 2007-10-04 | Fujitsu Ltd | 半導体装置の検査装置及び検査方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS55125641A (en) | 1980-09-27 |
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