JPS6136375B2 - - Google Patents
Info
- Publication number
- JPS6136375B2 JPS6136375B2 JP53022527A JP2252778A JPS6136375B2 JP S6136375 B2 JPS6136375 B2 JP S6136375B2 JP 53022527 A JP53022527 A JP 53022527A JP 2252778 A JP2252778 A JP 2252778A JP S6136375 B2 JPS6136375 B2 JP S6136375B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- aluminum alloy
- substrate
- sputtering
- alloy film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2252778A JPS54115064A (en) | 1978-02-28 | 1978-02-28 | Method of forming metal film |
| US06/015,896 US4218291A (en) | 1978-02-28 | 1979-02-28 | Process for forming metal and metal silicide films |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2252778A JPS54115064A (en) | 1978-02-28 | 1978-02-28 | Method of forming metal film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54115064A JPS54115064A (en) | 1979-09-07 |
| JPS6136375B2 true JPS6136375B2 (enExample) | 1986-08-18 |
Family
ID=12085255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2252778A Granted JPS54115064A (en) | 1978-02-28 | 1978-02-28 | Method of forming metal film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54115064A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3244461A1 (de) * | 1982-12-01 | 1984-06-07 | Siemens AG, 1000 Berlin und 8000 München | Integrierte halbleiterschaltung mit einer aus einer aluminium/silizium-legierung bestehenden kontaktleiterbahnebene |
| JPS62237724A (ja) * | 1986-04-07 | 1987-10-17 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
-
1978
- 1978-02-28 JP JP2252778A patent/JPS54115064A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54115064A (en) | 1979-09-07 |
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