JPS6134655B2 - - Google Patents

Info

Publication number
JPS6134655B2
JPS6134655B2 JP54154189A JP15418979A JPS6134655B2 JP S6134655 B2 JPS6134655 B2 JP S6134655B2 JP 54154189 A JP54154189 A JP 54154189A JP 15418979 A JP15418979 A JP 15418979A JP S6134655 B2 JPS6134655 B2 JP S6134655B2
Authority
JP
Japan
Prior art keywords
pattern
resist
exposed
sulfone
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54154189A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5677844A (en
Inventor
Kazuo Toda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15418979A priority Critical patent/JPS5677844A/ja
Publication of JPS5677844A publication Critical patent/JPS5677844A/ja
Publication of JPS6134655B2 publication Critical patent/JPS6134655B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polymerisation Methods In General (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP15418979A 1979-11-30 1979-11-30 Resist pattern forming method Granted JPS5677844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15418979A JPS5677844A (en) 1979-11-30 1979-11-30 Resist pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15418979A JPS5677844A (en) 1979-11-30 1979-11-30 Resist pattern forming method

Publications (2)

Publication Number Publication Date
JPS5677844A JPS5677844A (en) 1981-06-26
JPS6134655B2 true JPS6134655B2 (en, 2012) 1986-08-08

Family

ID=15578773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15418979A Granted JPS5677844A (en) 1979-11-30 1979-11-30 Resist pattern forming method

Country Status (1)

Country Link
JP (1) JPS5677844A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6081158A (ja) * 1983-10-11 1985-05-09 Hitachi Ltd 放射線感応物質
JPS60195940A (ja) * 1984-03-17 1985-10-04 Mitsubishi Electric Corp 微細パタ−ン形成方法

Also Published As

Publication number Publication date
JPS5677844A (en) 1981-06-26

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