JPS6133263B2 - - Google Patents

Info

Publication number
JPS6133263B2
JPS6133263B2 JP14359377A JP14359377A JPS6133263B2 JP S6133263 B2 JPS6133263 B2 JP S6133263B2 JP 14359377 A JP14359377 A JP 14359377A JP 14359377 A JP14359377 A JP 14359377A JP S6133263 B2 JPS6133263 B2 JP S6133263B2
Authority
JP
Japan
Prior art keywords
film
gate
polycrystalline silicon
oxide film
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14359377A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5476069A (en
Inventor
Kazunori Imaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14359377A priority Critical patent/JPS5476069A/ja
Publication of JPS5476069A publication Critical patent/JPS5476069A/ja
Publication of JPS6133263B2 publication Critical patent/JPS6133263B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP14359377A 1977-11-30 1977-11-30 Manufacture of semiconductor device Granted JPS5476069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14359377A JPS5476069A (en) 1977-11-30 1977-11-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14359377A JPS5476069A (en) 1977-11-30 1977-11-30 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5476069A JPS5476069A (en) 1979-06-18
JPS6133263B2 true JPS6133263B2 (enrdf_load_html_response) 1986-08-01

Family

ID=15342322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14359377A Granted JPS5476069A (en) 1977-11-30 1977-11-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5476069A (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115569A (en) * 1980-02-18 1981-09-10 Nippon Telegr & Teleph Corp <Ntt> Manufacture of mis field effect transistor integrated circuit device
JPS57167677A (en) * 1981-03-31 1982-10-15 Fujitsu Ltd Semiconductor device and manufacture thereof
CA1197926A (en) * 1981-12-16 1985-12-10 William D. Ryden Zero drain overlap and self-aligned contacts and contact methods for mod devices
US5244621A (en) * 1989-12-26 1993-09-14 Mitsubishi Gas Chemical Company, Inc. Process for shaping ceramic composites

Also Published As

Publication number Publication date
JPS5476069A (en) 1979-06-18

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