JPS6132393B2 - - Google Patents

Info

Publication number
JPS6132393B2
JPS6132393B2 JP52019272A JP1927277A JPS6132393B2 JP S6132393 B2 JPS6132393 B2 JP S6132393B2 JP 52019272 A JP52019272 A JP 52019272A JP 1927277 A JP1927277 A JP 1927277A JP S6132393 B2 JPS6132393 B2 JP S6132393B2
Authority
JP
Japan
Prior art keywords
vacuum
storage chamber
processing
processing apparatus
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52019272A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53104580A (en
Inventor
Shuetsu Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP1927277A priority Critical patent/JPS53104580A/ja
Publication of JPS53104580A publication Critical patent/JPS53104580A/ja
Publication of JPS6132393B2 publication Critical patent/JPS6132393B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP1927277A 1977-02-25 1977-02-25 Vacuum continuous treatment apparatus Granted JPS53104580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1927277A JPS53104580A (en) 1977-02-25 1977-02-25 Vacuum continuous treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1927277A JPS53104580A (en) 1977-02-25 1977-02-25 Vacuum continuous treatment apparatus

Publications (2)

Publication Number Publication Date
JPS53104580A JPS53104580A (en) 1978-09-11
JPS6132393B2 true JPS6132393B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-07-26

Family

ID=11994802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1927277A Granted JPS53104580A (en) 1977-02-25 1977-02-25 Vacuum continuous treatment apparatus

Country Status (1)

Country Link
JP (1) JPS53104580A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022021694A1 (zh) * 2020-07-30 2022-02-03 宿迁市金田塑业有限公司 一种可实现连续镀膜功能的真空镀膜机

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756815A (en) * 1979-12-21 1988-07-12 Varian Associates, Inc. Wafer coating system
JPS5792838A (en) * 1980-12-02 1982-06-09 Anelva Corp Cassette to cassette substrate process device
JPS6193542A (ja) * 1984-10-12 1986-05-12 Anelva Corp 真空装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5222073B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-13 1977-06-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022021694A1 (zh) * 2020-07-30 2022-02-03 宿迁市金田塑业有限公司 一种可实现连续镀膜功能的真空镀膜机

Also Published As

Publication number Publication date
JPS53104580A (en) 1978-09-11

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