JPS6132244B2 - - Google Patents

Info

Publication number
JPS6132244B2
JPS6132244B2 JP17986482A JP17986482A JPS6132244B2 JP S6132244 B2 JPS6132244 B2 JP S6132244B2 JP 17986482 A JP17986482 A JP 17986482A JP 17986482 A JP17986482 A JP 17986482A JP S6132244 B2 JPS6132244 B2 JP S6132244B2
Authority
JP
Japan
Prior art keywords
ammonia
silicon nitride
gas
temperature
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17986482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5973412A (ja
Inventor
Masashi Hasegawa
Shigeo Hyama
Tadasuke Shigi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP17986482A priority Critical patent/JPS5973412A/ja
Publication of JPS5973412A publication Critical patent/JPS5973412A/ja
Publication of JPS6132244B2 publication Critical patent/JPS6132244B2/ja
Granted legal-status Critical Current

Links

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  • Ceramic Products (AREA)
JP17986482A 1982-10-15 1982-10-15 窒化けい素粉体の製造方法 Granted JPS5973412A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17986482A JPS5973412A (ja) 1982-10-15 1982-10-15 窒化けい素粉体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17986482A JPS5973412A (ja) 1982-10-15 1982-10-15 窒化けい素粉体の製造方法

Publications (2)

Publication Number Publication Date
JPS5973412A JPS5973412A (ja) 1984-04-25
JPS6132244B2 true JPS6132244B2 (enExample) 1986-07-25

Family

ID=16073240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17986482A Granted JPS5973412A (ja) 1982-10-15 1982-10-15 窒化けい素粉体の製造方法

Country Status (1)

Country Link
JP (1) JPS5973412A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3536933A1 (de) * 1985-10-17 1987-04-23 Bayer Ag Verbessertes siliciumnitrid und verfahren zu dessen herstellung
US4788049A (en) * 1986-03-21 1988-11-29 Gte Products Corporation Method for controlling the crystal morphology of silicon nitride
JP2561396Y2 (ja) * 1990-02-20 1998-01-28 三菱農機株式会社 作業用走行機体における変速装置
GB9306802D0 (en) * 1993-04-01 1993-05-26 Tioxide Specialties Ltd Process for the production of silicon nitride

Also Published As

Publication number Publication date
JPS5973412A (ja) 1984-04-25

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