JPS6131638B2 - - Google Patents
Info
- Publication number
- JPS6131638B2 JPS6131638B2 JP8850677A JP8850677A JPS6131638B2 JP S6131638 B2 JPS6131638 B2 JP S6131638B2 JP 8850677 A JP8850677 A JP 8850677A JP 8850677 A JP8850677 A JP 8850677A JP S6131638 B2 JPS6131638 B2 JP S6131638B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode
- type semiconductor
- sio
- shows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 56
- 239000002184 metal Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 29
- 230000015572 biosynthetic process Effects 0.000 claims description 22
- 229920002120 photoresistant polymer Polymers 0.000 claims description 18
- 230000004888 barrier function Effects 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 230000003647 oxidation Effects 0.000 claims description 14
- 238000007254 oxidation reaction Methods 0.000 claims description 14
- 230000015556 catabolic process Effects 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 238000002048 anodisation reaction Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000004904 shortening Methods 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 36
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 11
- 238000003486 chemical etching Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- 238000007743 anodising Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8850677A JPS5423375A (en) | 1977-07-22 | 1977-07-22 | Manufacture of schottky barrier type electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8850677A JPS5423375A (en) | 1977-07-22 | 1977-07-22 | Manufacture of schottky barrier type electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5423375A JPS5423375A (en) | 1979-02-21 |
| JPS6131638B2 true JPS6131638B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-07-21 |
Family
ID=13944701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8850677A Granted JPS5423375A (en) | 1977-07-22 | 1977-07-22 | Manufacture of schottky barrier type electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5423375A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61103744A (ja) * | 1984-10-25 | 1986-05-22 | Osaka Kiko Co Ltd | 工作機械の工具交換装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4324259B2 (ja) * | 1998-07-07 | 2009-09-02 | シャープ株式会社 | 液晶表示装置の製造方法 |
-
1977
- 1977-07-22 JP JP8850677A patent/JPS5423375A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61103744A (ja) * | 1984-10-25 | 1986-05-22 | Osaka Kiko Co Ltd | 工作機械の工具交換装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5423375A (en) | 1979-02-21 |