JPS6130734B2 - - Google Patents

Info

Publication number
JPS6130734B2
JPS6130734B2 JP53034529A JP3452978A JPS6130734B2 JP S6130734 B2 JPS6130734 B2 JP S6130734B2 JP 53034529 A JP53034529 A JP 53034529A JP 3452978 A JP3452978 A JP 3452978A JP S6130734 B2 JPS6130734 B2 JP S6130734B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
film
tungsten
mos
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53034529A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54127283A (en
Inventor
Nobuo Toyokura
Hiroshi Tokunaga
Shinichi Inoe
Hajime Ishikawa
Masaichi Shinoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3452978A priority Critical patent/JPS54127283A/ja
Priority to NL7902247A priority patent/NL7902247A/xx
Priority to US06/023,460 priority patent/US4270136A/en
Priority to DE2911484A priority patent/DE2911484C2/de
Publication of JPS54127283A publication Critical patent/JPS54127283A/ja
Priority to US06/217,689 priority patent/US4349395A/en
Publication of JPS6130734B2 publication Critical patent/JPS6130734B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Local Oxidation Of Silicon (AREA)
JP3452978A 1978-03-25 1978-03-25 Semiconductor device and its manufacture Granted JPS54127283A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP3452978A JPS54127283A (en) 1978-03-25 1978-03-25 Semiconductor device and its manufacture
NL7902247A NL7902247A (nl) 1978-03-25 1979-03-22 Metaal-isolator-halfgeleidertype halfgeleiderinrich- ting en werkwijze voor het vervaardigen ervan.
US06/023,460 US4270136A (en) 1978-03-25 1979-03-23 MIS Device having a metal and insulating layer containing at least one cation-trapping element
DE2911484A DE2911484C2 (de) 1978-03-25 1979-03-23 Metall-Isolator-Halbleiterbauelement
US06/217,689 US4349395A (en) 1978-03-25 1980-12-18 Method for producing MOS semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3452978A JPS54127283A (en) 1978-03-25 1978-03-25 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS54127283A JPS54127283A (en) 1979-10-03
JPS6130734B2 true JPS6130734B2 (enExample) 1986-07-15

Family

ID=12416792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3452978A Granted JPS54127283A (en) 1978-03-25 1978-03-25 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS54127283A (enExample)

Also Published As

Publication number Publication date
JPS54127283A (en) 1979-10-03

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