JPS6130285Y2 - - Google Patents

Info

Publication number
JPS6130285Y2
JPS6130285Y2 JP6278482U JP6278482U JPS6130285Y2 JP S6130285 Y2 JPS6130285 Y2 JP S6130285Y2 JP 6278482 U JP6278482 U JP 6278482U JP 6278482 U JP6278482 U JP 6278482U JP S6130285 Y2 JPS6130285 Y2 JP S6130285Y2
Authority
JP
Japan
Prior art keywords
roller
wafer
driven roller
end surface
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6278482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58166035U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6278482U priority Critical patent/JPS58166035U/ja
Publication of JPS58166035U publication Critical patent/JPS58166035U/ja
Application granted granted Critical
Publication of JPS6130285Y2 publication Critical patent/JPS6130285Y2/ja
Granted legal-status Critical Current

Links

JP6278482U 1982-04-29 1982-04-29 ウエハの位置決め装置 Granted JPS58166035U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6278482U JPS58166035U (ja) 1982-04-29 1982-04-29 ウエハの位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6278482U JPS58166035U (ja) 1982-04-29 1982-04-29 ウエハの位置決め装置

Publications (2)

Publication Number Publication Date
JPS58166035U JPS58166035U (ja) 1983-11-05
JPS6130285Y2 true JPS6130285Y2 (ru) 1986-09-05

Family

ID=30072918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6278482U Granted JPS58166035U (ja) 1982-04-29 1982-04-29 ウエハの位置決め装置

Country Status (1)

Country Link
JP (1) JPS58166035U (ru)

Also Published As

Publication number Publication date
JPS58166035U (ja) 1983-11-05

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