JPS6130284Y2 - - Google Patents

Info

Publication number
JPS6130284Y2
JPS6130284Y2 JP19649081U JP19649081U JPS6130284Y2 JP S6130284 Y2 JPS6130284 Y2 JP S6130284Y2 JP 19649081 U JP19649081 U JP 19649081U JP 19649081 U JP19649081 U JP 19649081U JP S6130284 Y2 JPS6130284 Y2 JP S6130284Y2
Authority
JP
Japan
Prior art keywords
belt
curved portion
inner belt
wafer
belts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19649081U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5899834U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19649081U priority Critical patent/JPS5899834U/ja
Publication of JPS5899834U publication Critical patent/JPS5899834U/ja
Application granted granted Critical
Publication of JPS6130284Y2 publication Critical patent/JPS6130284Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Relays Between Conveyors (AREA)
  • Registering Or Overturning Sheets (AREA)
JP19649081U 1981-12-26 1981-12-26 搬送装置 Granted JPS5899834U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19649081U JPS5899834U (ja) 1981-12-26 1981-12-26 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19649081U JPS5899834U (ja) 1981-12-26 1981-12-26 搬送装置

Publications (2)

Publication Number Publication Date
JPS5899834U JPS5899834U (ja) 1983-07-07
JPS6130284Y2 true JPS6130284Y2 (enrdf_load_stackoverflow) 1986-09-05

Family

ID=30109730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19649081U Granted JPS5899834U (ja) 1981-12-26 1981-12-26 搬送装置

Country Status (1)

Country Link
JP (1) JPS5899834U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5899834U (ja) 1983-07-07

Similar Documents

Publication Publication Date Title
JPH0538686A (ja) 搬送装置
KR970000967B1 (ko) 웨이퍼 운반 장치
CN105417103B (zh) 生瓷带料自动翻转机构
JPS6130284Y2 (enrdf_load_stackoverflow)
JPS5994840A (ja) ウエハ搬送装置
CN213212136U (zh) 一种晶圆传送系统
JPH058835A (ja) プリント基板搬送制御方法
JP2005044981A (ja) 搬送装置
JP2002334917A (ja) 半導体ウエハーの端面を保持するパレット式枚葉搬送コンベヤと移載ロボット、ｉｄ読み取り装置、バッファーステーションからなる搬送設備
JPS6142687B2 (enrdf_load_stackoverflow)
US20230406372A1 (en) Transport vehicle and transport apparatus
JPH0311648A (ja) 半導体ウェハー搬送装置
JPS63107138A (ja) ウエハ処理装置
JPS6018446A (ja) 搬送車
JP2818722B2 (ja) 搬送装置
JPH04249337A (ja) 搬送装置
JPS6357451A (ja) 板状物搬送装置
JPH04323111A (ja) 車両用ホイールの搬送用コンベア装置
JPS6115208U (ja) 部品の搬送装置
SU1696354A2 (ru) Устройство дл транспортировани и подачи на рабочую позицию плоских деталей
JPH05218173A (ja) 半導体ウエハーの搬送方法
JPH10316232A (ja) 搬送装置
JPS6387737A (ja) ウエハ搬送装置
JPH0134711B2 (enrdf_load_stackoverflow)
JPS58190039A (ja) インライン型半導体製造装置