JPS6130282Y2 - - Google Patents
Info
- Publication number
- JPS6130282Y2 JPS6130282Y2 JP18717280U JP18717280U JPS6130282Y2 JP S6130282 Y2 JPS6130282 Y2 JP S6130282Y2 JP 18717280 U JP18717280 U JP 18717280U JP 18717280 U JP18717280 U JP 18717280U JP S6130282 Y2 JPS6130282 Y2 JP S6130282Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- guide plate
- positioning mechanism
- vacuum head
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims 4
- 238000012993 chemical processing Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18717280U JPS6130282Y2 (zh) | 1980-12-25 | 1980-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18717280U JPS6130282Y2 (zh) | 1980-12-25 | 1980-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57110947U JPS57110947U (zh) | 1982-07-09 |
| JPS6130282Y2 true JPS6130282Y2 (zh) | 1986-09-05 |
Family
ID=29989755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18717280U Expired JPS6130282Y2 (zh) | 1980-12-25 | 1980-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130282Y2 (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7148373B2 (ja) * | 2018-11-20 | 2022-10-05 | 株式会社東京精密 | ウエハ受け渡し装置 |
| JP7148374B2 (ja) * | 2018-11-20 | 2022-10-05 | 株式会社東京精密 | ウエハ受け渡し装置 |
-
1980
- 1980-12-25 JP JP18717280U patent/JPS6130282Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57110947U (zh) | 1982-07-09 |
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