JPS61295949A - 板状部材の搬送装置 - Google Patents

板状部材の搬送装置

Info

Publication number
JPS61295949A
JPS61295949A JP60136189A JP13618985A JPS61295949A JP S61295949 A JPS61295949 A JP S61295949A JP 60136189 A JP60136189 A JP 60136189A JP 13618985 A JP13618985 A JP 13618985A JP S61295949 A JPS61295949 A JP S61295949A
Authority
JP
Japan
Prior art keywords
arm
wafer
plate
shaft
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60136189A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435312B2 (enrdf_load_stackoverflow
Inventor
Tsuneo Uchiyama
内山　恒夫
Takashi Katagiri
孝 片桐
Tatsuya Inayoshi
稲吉　達也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Seiko Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Seiko Ltd filed Critical Hitachi Seiko Ltd
Priority to JP60136189A priority Critical patent/JPS61295949A/ja
Publication of JPS61295949A publication Critical patent/JPS61295949A/ja
Publication of JPH0435312B2 publication Critical patent/JPH0435312B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Manipulator (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Registering Or Overturning Sheets (AREA)
JP60136189A 1985-06-24 1985-06-24 板状部材の搬送装置 Granted JPS61295949A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60136189A JPS61295949A (ja) 1985-06-24 1985-06-24 板状部材の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60136189A JPS61295949A (ja) 1985-06-24 1985-06-24 板状部材の搬送装置

Publications (2)

Publication Number Publication Date
JPS61295949A true JPS61295949A (ja) 1986-12-26
JPH0435312B2 JPH0435312B2 (enrdf_load_stackoverflow) 1992-06-10

Family

ID=15169424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60136189A Granted JPS61295949A (ja) 1985-06-24 1985-06-24 板状部材の搬送装置

Country Status (1)

Country Link
JP (1) JPS61295949A (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829574A (enrdf_load_stackoverflow) * 1971-07-16 1973-04-19
JPS5427484U (enrdf_load_stackoverflow) * 1977-07-27 1979-02-22
JPS5840289A (ja) * 1981-08-31 1983-03-09 日本電気株式会社 無拘束回転型ロボツト
JPS6052295A (ja) * 1983-08-30 1985-03-25 エスエムシ−株式会社 ロボツト

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829574A (enrdf_load_stackoverflow) * 1971-07-16 1973-04-19
JPS5427484U (enrdf_load_stackoverflow) * 1977-07-27 1979-02-22
JPS5840289A (ja) * 1981-08-31 1983-03-09 日本電気株式会社 無拘束回転型ロボツト
JPS6052295A (ja) * 1983-08-30 1985-03-25 エスエムシ−株式会社 ロボツト

Also Published As

Publication number Publication date
JPH0435312B2 (enrdf_load_stackoverflow) 1992-06-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees