JPS61295633A - レジスト塗布装置 - Google Patents

レジスト塗布装置

Info

Publication number
JPS61295633A
JPS61295633A JP60139613A JP13961385A JPS61295633A JP S61295633 A JPS61295633 A JP S61295633A JP 60139613 A JP60139613 A JP 60139613A JP 13961385 A JP13961385 A JP 13961385A JP S61295633 A JPS61295633 A JP S61295633A
Authority
JP
Japan
Prior art keywords
cup
wafer
exhaust port
current
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60139613A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322687B2 (enExample
Inventor
Katsunori Takahashi
勝徳 高橋
Yukio Sonobe
園部　幸夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60139613A priority Critical patent/JPS61295633A/ja
Publication of JPS61295633A publication Critical patent/JPS61295633A/ja
Publication of JPH0322687B2 publication Critical patent/JPH0322687B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
JP60139613A 1985-06-24 1985-06-24 レジスト塗布装置 Granted JPS61295633A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60139613A JPS61295633A (ja) 1985-06-24 1985-06-24 レジスト塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60139613A JPS61295633A (ja) 1985-06-24 1985-06-24 レジスト塗布装置

Publications (2)

Publication Number Publication Date
JPS61295633A true JPS61295633A (ja) 1986-12-26
JPH0322687B2 JPH0322687B2 (enExample) 1991-03-27

Family

ID=15249367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60139613A Granted JPS61295633A (ja) 1985-06-24 1985-06-24 レジスト塗布装置

Country Status (1)

Country Link
JP (1) JPS61295633A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015026792A (ja) * 2013-07-29 2015-02-05 東京エレクトロン株式会社 塗布膜形成装置、塗布膜形成方法、記憶媒体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015026792A (ja) * 2013-07-29 2015-02-05 東京エレクトロン株式会社 塗布膜形成装置、塗布膜形成方法、記憶媒体
KR20150014383A (ko) * 2013-07-29 2015-02-06 도쿄엘렉트론가부시키가이샤 도포막 형성 장치, 도포막 형성 방법, 기억 매체

Also Published As

Publication number Publication date
JPH0322687B2 (enExample) 1991-03-27

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