JPS61294813A - 液相エピタキシヤル成長用溶液の製造方法 - Google Patents

液相エピタキシヤル成長用溶液の製造方法

Info

Publication number
JPS61294813A
JPS61294813A JP60137231A JP13723185A JPS61294813A JP S61294813 A JPS61294813 A JP S61294813A JP 60137231 A JP60137231 A JP 60137231A JP 13723185 A JP13723185 A JP 13723185A JP S61294813 A JPS61294813 A JP S61294813A
Authority
JP
Japan
Prior art keywords
solution
reservoir
auxiliary
slider
liquid phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60137231A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0251249B2 (enrdf_load_stackoverflow
Inventor
Noriyuki Hirayama
平山　則行
Masaaki Oshima
大島　正晃
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60137231A priority Critical patent/JPS61294813A/ja
Publication of JPS61294813A publication Critical patent/JPS61294813A/ja
Publication of JPH0251249B2 publication Critical patent/JPH0251249B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP60137231A 1985-06-24 1985-06-24 液相エピタキシヤル成長用溶液の製造方法 Granted JPS61294813A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60137231A JPS61294813A (ja) 1985-06-24 1985-06-24 液相エピタキシヤル成長用溶液の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60137231A JPS61294813A (ja) 1985-06-24 1985-06-24 液相エピタキシヤル成長用溶液の製造方法

Publications (2)

Publication Number Publication Date
JPS61294813A true JPS61294813A (ja) 1986-12-25
JPH0251249B2 JPH0251249B2 (enrdf_load_stackoverflow) 1990-11-06

Family

ID=15193846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60137231A Granted JPS61294813A (ja) 1985-06-24 1985-06-24 液相エピタキシヤル成長用溶液の製造方法

Country Status (1)

Country Link
JP (1) JPS61294813A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0251249B2 (enrdf_load_stackoverflow) 1990-11-06

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