JPS61294508A - Positioning device - Google Patents

Abstract

PURPOSE:To attain an automatic positioning action with high accuracy by image picking up a member held by a holding means and adding the correction amount of a position shift obtained from an image processing to the holding means. CONSTITUTION:A positioning device 14 which fixes a semiconductor pellet 10 is provided with a rotatable collet 15 which sucks and holds the pellet 10, an image pickup means 11 set at the lower part, an arithmetic correction circuit 17 which corrects the pellet position through the image processing and a control circuit 18 which drives and controls the collet 15 with the output of the circuit 17. Then the position of the pellet 10 is magnified by a microscope 19 of the means 11 and picked up by a TV camera 20 in a high magnification ratio to undergo the image processing. Thus the correction amounts are given to the circuit 18 from the circuit 17 for shifts to X and Y axes of the pellet 10 as well as the displacement angle. Furthermore these correction amounts are also given to a collet driving part 30 for drive and control of the collet 15.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a positioning device that is advantageously used, for example, in the assembly process of semiconductor lasers.

BACKGROUND ART In a conventional semiconductor laser assembly process, an operator positions a semiconductor laser chip (hereinafter referred to as a semiconductor pellet) using a microscope in order to bond the semiconductor laser chip (hereinafter referred to as a semiconductor pellet) with high precision. That is, as shown in FIG. 4, the end face 1a of the semiconductor pellet 1, which is attracted to a collet (not shown) at an angle θ, is aligned with the cursor line 2 of the microscope, and the cursor #! 2, the reference plane of a ring (not shown) is positioned by rotation or movement in the X-Y axis directions, and then the semiconductor pellet 1 is fixed to the ring with a Guibond.

In such prior art, a semiconductor pellet 1 is attached to the fret.
Before picking up the semiconductor pellet 1, place it on the steno and press 8! Since it is necessary to mechanically position the semiconductor pellet 1 at the reference position and then adsorb the semiconductor pellet 1 with the fret to perform the Guibond as described above, high precision and automation of the Guibond cannot be achieved.

Problems to be Solved by the Invention The purpose of the present invention is to solve the above-mentioned technical problems and to make it possible to position a member to be positioned, such as a semiconductor pellet, with high precision and automatically. There are some products that provide positioning devices.

Means for Solving Problems The present invention provides means for holding a member to be positioned, and a means for capturing an image of the member to be positioned while being held by the holding means, and performing image processing to position the member. and means for correcting the current position of the member to a predetermined reference position, and the correction amount by the correction means is added to the holding means to correct the position of the member to be positioned. This is a positioning device.

According to the present invention, the positional deviation of the member to be positioned is corrected by taking an image of the member to be positioned and performing image processing, and the amount of correction is added to the holding means at the time of bonding. , it becomes possible to perform Guibond work automatically and with high precision.

Embodiment FIG. 1 is a schematic diagram of an embodiment of the present invention, and FIG. 2 is a diagram showing the display screen 12 of the imaging means 11.
A is a plan view of the ring 13 to which the semiconductor pellet 10 is fixed. The positioning device 14 according to the present invention basically attracts and holds the semiconductor pellet 10, and the pongee #!
A collet 15 that is rotatable around the circumference, an imaging means 11 disposed below the collet 15, an arithmetic correction circuit 17 that corrects the position of the semiconductor bellet 10 displayed as an image by the imaging means 11 through image processing, and an arithmetic correction circuit 17
and a control circuit 18 for driving and controlling the collet 15 in response to an output from the collet 15. The semiconductor pellet 10 is attracted and held by the collet 15. Collet 15 is
It is formed into a rod-like body and can rotate around the vertical axis #I. The semiconductor bellet 10 is sucked and held by the suction portion 15a at the lower end of the collet 15. colette 15
An imaging means 11 is arranged below. Image sensor Pi1
1 is a microscope 1t placed facing the semiconductor pellet 10;
19, and a television camera 20 attached to the microscope #t19.
(including the semiconductor book beret adsorbed to the collet 15) 1
0 is magnified by the W1 microscope 19 and imaged at high magnification by the television camera 20. The television camera 20 performs image processing. The binary image of the semiconductor chip 7F10 is displayed on the display screen 12. On the zero display screen 12, a cursor line 16 serving as a reference is set in advance as shown in FIG. 2(1). Cursor M】6
consists of a horizontal reference #i21 and two vertical reference lines 22 and 23 that intersect the horizontal reference 11!21. Vertical reference i2
The interval L1 of 2.23 is selected to be equal to the widthwise length L2 of the semiconductor right 10. The position of the semiconductor bullet 10 with respect to such a cursor line 16 is
The end face 1011 of the semiconductor pellet 10 and the horizontal reference #1
21 coincides with one Il of semiconductor bellet) 10.
The end face 10b is corrected to match the vertical reference Ji22, and the other side end face 10c is corrected to match the vertical reference line 23. The correction amount in this case is the movement of the semiconductor pellet 10 in the X-axis force direction and the Y-axis direction, and the angular displacement angle θ1. This correction amount is calculated from the calculation correction circuit 17 to the control circuit 18.
and further to the collet drive section 30.

The drive control of the fret 15 is thereby performed. In this way, the above-mentioned correction amount of the semiconductor bereph 10 is added to the collet 15 during actual Guibonding work.

The collet 15 to which the correction amount has been added in this manner is slowly moved to the ring 13 shown in the third figure fixed at a fixed position while adsorbing the semiconductor pellet 16. The bellet fixing position W131 of the ring 13 is made of a metal material such as innoum, and the semiconductor bellet 10 can be fixed to the ring 13 by heating the innoum and then cooling it. After the semiconductor pellet (10) is fixed to the ring 13, the suction state of the fret 15 is released, and the collet 15 moves on to the suction operation of the next semiconductor pellet. The semiconductor Pellef) 10, which has been positioned in advance by the collet 15, is moved to the pellet fixing position 31 of the ring 13.
By fixing the semiconductor pellet 1 to
Guibond of 0 can be performed with high precision. Therefore, since the laser emission point after the semiconductor laser is assembled is set with extremely high precision, the reliability of the semiconductor laser device is extremely improved.

According to the inventor's experiments, the following advantages could be obtained.

(1) The rotatable collet 1 is
The television camera 20''c1m image processing is performed from below the semiconductor pellet 10 adsorbed to the semiconductor pellet 10, and the binarized image of the semiconductor pellet 10 is corrected with respect to the reference cursor line 16,
By adding the amount of correction, that is, the same direction movement of the semiconductor pellet 10 in the X wheel direction, upper C/Y arm direction, and its rotational direction θ1 to the collet 15 during actual Guibonding, it is possible to achieve high precision and automatic The semiconductor pellet 10 can be accurately aligned with the ring 13.

(2) Since the position of the semiconductor pellet 10 is corrected while the fret 15 is held under suction, the amount of gomeno applied to the semiconductor pellet 10 can be reduced compared to the conventional mechanical alignment.

(3) With the semiconductor pellet 10 adsorbed and held on the fret 15, the television camera 2 is passed through the microscope 19 from below.
Since the image is projected by 0, the semiconductor bullet 10 is placed at the center of the television camera 20, and image processing can be performed at high magnification.

(4) Since the semiconductor pellet 10 is displayed on the display screen 12, if a part of the exterior of the semiconductor pellet 10 is missing or scratched, it is extremely easy to classify the IP4, and this makes it easy to identify defective products. It is possible to improve the yield without any problems.

The positioning device according to the invention is not limited to the semiconductor pellet 10, but can be implemented over a wide range of technical fields.

Effects As described above, according to the present invention, the member to be positioned held by the holding means is imaged, and the deviation between the current position of the member to be positioned and the predetermined position is detected by image processing. By correcting this amount by adding the correction amount to the holding means, it is possible to perform the positioning operation with high accuracy and automatically.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of an embodiment of the present invention, FIG. 2 is a diagram for explaining the display screen 12 of the imaging means 11, FIG. 3 is a plan view of the ring J3, and FIG. 4 is for explaining the prior art. This is a diagram for 1.10... semiconductor bellet), 2.16... cursor line, 11... imaging means, 12... display screen, 14
...Positioning device, 15...Fret, 17...
Arithmetic correction circuit, 21...Horizontal reference line, 22.23...
・Vertical reference line agent Patent attorney Keiichi Mohammed Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] A means for holding a member to be positioned; and a means for capturing an image of the member to be positioned while being held by the holding means, and performing image processing to determine the current position of the member to be positioned based on a predetermined standard. 1. A positioning device comprising: means for correcting the position of the member to be positioned, and correcting the position of the member to be positioned by adding the amount of correction by the correcting means to the holding means.