JPS61294327A - 放物面鏡の表面形状測定用干渉方法及び放物面鏡の表面形状測定用干渉計 - Google Patents

放物面鏡の表面形状測定用干渉方法及び放物面鏡の表面形状測定用干渉計

Info

Publication number
JPS61294327A
JPS61294327A JP60135692A JP13569285A JPS61294327A JP S61294327 A JPS61294327 A JP S61294327A JP 60135692 A JP60135692 A JP 60135692A JP 13569285 A JP13569285 A JP 13569285A JP S61294327 A JPS61294327 A JP S61294327A
Authority
JP
Japan
Prior art keywords
light
parabolic mirror
reflected
surface shape
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60135692A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0552881B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kouji Tenjinbayashi
天神林　孝二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60135692A priority Critical patent/JPS61294327A/ja
Publication of JPS61294327A publication Critical patent/JPS61294327A/ja
Publication of JPH0552881B2 publication Critical patent/JPH0552881B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP60135692A 1985-06-21 1985-06-21 放物面鏡の表面形状測定用干渉方法及び放物面鏡の表面形状測定用干渉計 Granted JPS61294327A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60135692A JPS61294327A (ja) 1985-06-21 1985-06-21 放物面鏡の表面形状測定用干渉方法及び放物面鏡の表面形状測定用干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60135692A JPS61294327A (ja) 1985-06-21 1985-06-21 放物面鏡の表面形状測定用干渉方法及び放物面鏡の表面形状測定用干渉計

Publications (2)

Publication Number Publication Date
JPS61294327A true JPS61294327A (ja) 1986-12-25
JPH0552881B2 JPH0552881B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-06

Family

ID=15157680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60135692A Granted JPS61294327A (ja) 1985-06-21 1985-06-21 放物面鏡の表面形状測定用干渉方法及び放物面鏡の表面形状測定用干渉計

Country Status (1)

Country Link
JP (1) JPS61294327A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06288735A (ja) * 1993-03-31 1994-10-18 Agency Of Ind Science & Technol 放物面鏡形状検査測定用の位相共役干渉計
DE102022207359A1 (de) 2022-07-19 2024-01-25 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zum Bestimmen eines Passformfehlers bei einem Hohlspiegel

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958305A (ja) * 1982-09-29 1984-04-04 Hitachi Ltd 測定方法及びその装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958305A (ja) * 1982-09-29 1984-04-04 Hitachi Ltd 測定方法及びその装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06288735A (ja) * 1993-03-31 1994-10-18 Agency Of Ind Science & Technol 放物面鏡形状検査測定用の位相共役干渉計
DE102022207359A1 (de) 2022-07-19 2024-01-25 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zum Bestimmen eines Passformfehlers bei einem Hohlspiegel

Also Published As

Publication number Publication date
JPH0552881B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-06

Similar Documents

Publication Publication Date Title
CN100555772C (zh) 采用自准直反馈光路的非稳腔自动调腔系统及调腔方法和应用
US6806965B2 (en) Wavefront and intensity analyzer for collimated beams
US5493398A (en) Device for observing test-piece surfaces by the speckle-shearing-method for the measurement of deformations
US8154733B2 (en) Method and system for the optical measurement of large radii of curvature of optical functional surfaces
US20140340691A1 (en) Enhancements to integrated optical assembly
JPH0324432A (ja) 光学系、特に眼鏡用レンズの位相検出検査用光学装置
CN103115583A (zh) 基于受激辐射的Mirau荧光干涉显微测量装置
US20120170038A1 (en) Alignment Method for Inspecting a Mirror
JP6042586B2 (ja) 高開口数の位相シフト型デュアルピンホール回折干渉計およびその試験方法
JP2008107144A (ja) 屈折率分布測定装置及び測定方法
JPS63144206A (ja) 物体位置の測定方法
JPH0250411B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS61294327A (ja) 放物面鏡の表面形状測定用干渉方法及び放物面鏡の表面形状測定用干渉計
CN113295386B (zh) 一种光学镜片检测系统及检测方法
JPS62126305A (ja) 表面形状測定方法および装置
JPS60242304A (ja) 大口径平面鏡の表面形状測定用ホログラム干渉計
JPH05223690A (ja) レンズの透過性能測定装置
CN116989698B (zh) 一种组合式相位显微成像测量系统
CN114486198B (zh) 大口径反射镜检测系统
CN119223203B (zh) 一种基于宽带环形径向偏振光的超分辨显微干涉测量方法
JPH03156305A (ja) 非球面形状測定装置
JPS60211306A (ja) 縞走査シエアリング干渉測定装置における光学系調整方法
JPS62289704A (ja) シアリング干渉コントラスト法段差測定装置
JPH11325816A (ja) 非球面形状測定用干渉計
CN120522129A (zh) 基于混合散射场和偏振相衬检测的三维成像系统和方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term