JPS61291972A - マグネトロンスパツタ装置 - Google Patents

マグネトロンスパツタ装置

Info

Publication number
JPS61291972A
JPS61291972A JP13252685A JP13252685A JPS61291972A JP S61291972 A JPS61291972 A JP S61291972A JP 13252685 A JP13252685 A JP 13252685A JP 13252685 A JP13252685 A JP 13252685A JP S61291972 A JPS61291972 A JP S61291972A
Authority
JP
Japan
Prior art keywords
magnet
magnets
magnetic field
target
magnetron sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13252685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0243825B2 (member.php
Inventor
Masafumi Suzuki
雅史 鈴木
Hidenobu Shirai
白井　秀信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13252685A priority Critical patent/JPS61291972A/ja
Publication of JPS61291972A publication Critical patent/JPS61291972A/ja
Publication of JPH0243825B2 publication Critical patent/JPH0243825B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
JP13252685A 1985-06-18 1985-06-18 マグネトロンスパツタ装置 Granted JPS61291972A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13252685A JPS61291972A (ja) 1985-06-18 1985-06-18 マグネトロンスパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13252685A JPS61291972A (ja) 1985-06-18 1985-06-18 マグネトロンスパツタ装置

Publications (2)

Publication Number Publication Date
JPS61291972A true JPS61291972A (ja) 1986-12-22
JPH0243825B2 JPH0243825B2 (member.php) 1990-10-01

Family

ID=15083357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13252685A Granted JPS61291972A (ja) 1985-06-18 1985-06-18 マグネトロンスパツタ装置

Country Status (1)

Country Link
JP (1) JPS61291972A (member.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001073134A (ja) * 1999-07-06 2001-03-21 Applied Materials Inc スパッタリング装置および成膜方法
JP2001077052A (ja) * 1999-07-06 2001-03-23 Applied Materials Inc スパッタリング装置および成膜方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116774A (ja) * 1983-11-30 1985-06-24 Nippon Texas Instr Kk スパッタ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116774A (ja) * 1983-11-30 1985-06-24 Nippon Texas Instr Kk スパッタ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001073134A (ja) * 1999-07-06 2001-03-21 Applied Materials Inc スパッタリング装置および成膜方法
JP2001077052A (ja) * 1999-07-06 2001-03-23 Applied Materials Inc スパッタリング装置および成膜方法

Also Published As

Publication number Publication date
JPH0243825B2 (member.php) 1990-10-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees