JPH0243825B2 - - Google Patents

Info

Publication number
JPH0243825B2
JPH0243825B2 JP60132526A JP13252685A JPH0243825B2 JP H0243825 B2 JPH0243825 B2 JP H0243825B2 JP 60132526 A JP60132526 A JP 60132526A JP 13252685 A JP13252685 A JP 13252685A JP H0243825 B2 JPH0243825 B2 JP H0243825B2
Authority
JP
Japan
Prior art keywords
magnet
split
divided
magnetic field
magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60132526A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61291972A (ja
Inventor
Masafumi Suzuki
Hidenobu Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13252685A priority Critical patent/JPS61291972A/ja
Publication of JPS61291972A publication Critical patent/JPS61291972A/ja
Publication of JPH0243825B2 publication Critical patent/JPH0243825B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
JP13252685A 1985-06-18 1985-06-18 マグネトロンスパツタ装置 Granted JPS61291972A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13252685A JPS61291972A (ja) 1985-06-18 1985-06-18 マグネトロンスパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13252685A JPS61291972A (ja) 1985-06-18 1985-06-18 マグネトロンスパツタ装置

Publications (2)

Publication Number Publication Date
JPS61291972A JPS61291972A (ja) 1986-12-22
JPH0243825B2 true JPH0243825B2 (member.php) 1990-10-01

Family

ID=15083357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13252685A Granted JPS61291972A (ja) 1985-06-18 1985-06-18 マグネトロンスパツタ装置

Country Status (1)

Country Link
JP (1) JPS61291972A (member.php)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4680353B2 (ja) * 1999-07-06 2011-05-11 アプライド マテリアルズ インコーポレイテッド スパッタリング装置および成膜方法
JP4680352B2 (ja) * 1999-07-06 2011-05-11 アプライド マテリアルズ インコーポレイテッド スパッタリング装置および成膜方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0718006B2 (ja) * 1983-11-30 1995-03-01 日本テキサス・インスツルメンツ株式会社 スパッタ装置

Also Published As

Publication number Publication date
JPS61291972A (ja) 1986-12-22

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Legal Events

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