JPS6128942Y2 - - Google Patents
Info
- Publication number
- JPS6128942Y2 JPS6128942Y2 JP1003277U JP1003277U JPS6128942Y2 JP S6128942 Y2 JPS6128942 Y2 JP S6128942Y2 JP 1003277 U JP1003277 U JP 1003277U JP 1003277 U JP1003277 U JP 1003277U JP S6128942 Y2 JPS6128942 Y2 JP S6128942Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum chamber
- pipe
- continuous
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005192 partition Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 10
- 238000009423 ventilation Methods 0.000 claims description 5
- 239000003963 antioxidant agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003078 antioxidant effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Compressor (AREA)
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1003277U JPS6128942Y2 (enrdf_load_stackoverflow) | 1977-02-01 | 1977-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1003277U JPS6128942Y2 (enrdf_load_stackoverflow) | 1977-02-01 | 1977-02-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53105908U JPS53105908U (enrdf_load_stackoverflow) | 1978-08-25 |
| JPS6128942Y2 true JPS6128942Y2 (enrdf_load_stackoverflow) | 1986-08-27 |
Family
ID=28821878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1003277U Expired JPS6128942Y2 (enrdf_load_stackoverflow) | 1977-02-01 | 1977-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6128942Y2 (enrdf_load_stackoverflow) |
-
1977
- 1977-02-01 JP JP1003277U patent/JPS6128942Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53105908U (enrdf_load_stackoverflow) | 1978-08-25 |
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