JPS61284630A - 圧覚センサ - Google Patents
圧覚センサInfo
- Publication number
- JPS61284630A JPS61284630A JP60125246A JP12524685A JPS61284630A JP S61284630 A JPS61284630 A JP S61284630A JP 60125246 A JP60125246 A JP 60125246A JP 12524685 A JP12524685 A JP 12524685A JP S61284630 A JPS61284630 A JP S61284630A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- holes
- hole
- circular
- pressure sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Manipulator (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60125246A JPS61284630A (ja) | 1985-06-11 | 1985-06-11 | 圧覚センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60125246A JPS61284630A (ja) | 1985-06-11 | 1985-06-11 | 圧覚センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61284630A true JPS61284630A (ja) | 1986-12-15 |
JPH0546889B2 JPH0546889B2 (enrdf_load_stackoverflow) | 1993-07-15 |
Family
ID=14905384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60125246A Granted JPS61284630A (ja) | 1985-06-11 | 1985-06-11 | 圧覚センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61284630A (enrdf_load_stackoverflow) |
-
1985
- 1985-06-11 JP JP60125246A patent/JPS61284630A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0546889B2 (enrdf_load_stackoverflow) | 1993-07-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5000817A (en) | Batch method of making miniature structures assembled in wafer form | |
US3456226A (en) | Strain gage configuration | |
EP0401635B1 (en) | Manufacturing method of a detector using resistance elements | |
EP0311695B1 (en) | Force and moment detector using resistor | |
EP1514123B1 (en) | Monolithic silicon acceleration sensor | |
US20020014126A1 (en) | Force detector and acceleration detector and method of manufacturing the same | |
US10197462B2 (en) | Differential pressure sensor full overpressure protection device | |
US4732647A (en) | Batch method of making miniature capacitive force transducers assembled in wafer form | |
JP2007298471A (ja) | 力覚センサ用チップ | |
JPS6321530A (ja) | 力検出装置 | |
JPS61284630A (ja) | 圧覚センサ | |
JPS63196080A (ja) | 半導体力センサ及びそれを用いた触覚センサ | |
JPH03114272A (ja) | 感歪センサおよびその製造方法 | |
JP3478894B2 (ja) | 表面型の加速度センサ | |
US4884051A (en) | Semiconductor diffusion type force sensing apparatus | |
JPS6394690A (ja) | 力検出装置 | |
JPH07273353A (ja) | パッケージ構造3軸加速度センサ、およびその製造方法 | |
JP2684538B2 (ja) | 荷重変換器 | |
JPH0676929B2 (ja) | 分布型圧覚センサ | |
JPH0473631B2 (enrdf_load_stackoverflow) | ||
JP2746298B2 (ja) | 二成分以上の力検出装置 | |
JP2670048B2 (ja) | 力検出装置 | |
JPH0473629B2 (enrdf_load_stackoverflow) | ||
JPS61224465A (ja) | 力センサ及びその製造方法 | |
JPH0473630B2 (enrdf_load_stackoverflow) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |