JPS61284572A - 放電電極 - Google Patents
放電電極Info
- Publication number
- JPS61284572A JPS61284572A JP12748685A JP12748685A JPS61284572A JP S61284572 A JPS61284572 A JP S61284572A JP 12748685 A JP12748685 A JP 12748685A JP 12748685 A JP12748685 A JP 12748685A JP S61284572 A JPS61284572 A JP S61284572A
- Authority
- JP
- Japan
- Prior art keywords
- target
- magnetic field
- grooves
- generated
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 claims abstract description 22
- 230000005684 electric field Effects 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 150000002500 ions Chemical class 0.000 abstract description 3
- 239000000696 magnetic material Substances 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 230000005294 ferromagnetic effect Effects 0.000 description 3
- 239000003302 ferromagnetic material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12748685A JPS61284572A (ja) | 1985-06-12 | 1985-06-12 | 放電電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12748685A JPS61284572A (ja) | 1985-06-12 | 1985-06-12 | 放電電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61284572A true JPS61284572A (ja) | 1986-12-15 |
| JPH0216381B2 JPH0216381B2 (enrdf_load_stackoverflow) | 1990-04-17 |
Family
ID=14961132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12748685A Granted JPS61284572A (ja) | 1985-06-12 | 1985-06-12 | 放電電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61284572A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001181848A (ja) * | 1999-12-20 | 2001-07-03 | Anelva Corp | プラズマ処理装置 |
| KR100397751B1 (ko) * | 2001-07-18 | 2003-09-13 | 한전건 | 자성체 재료 코팅용 마그네트론 원 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57158381A (en) * | 1981-03-27 | 1982-09-30 | Nippon Sheet Glass Co Ltd | Magnetron sputtering device |
-
1985
- 1985-06-12 JP JP12748685A patent/JPS61284572A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57158381A (en) * | 1981-03-27 | 1982-09-30 | Nippon Sheet Glass Co Ltd | Magnetron sputtering device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001181848A (ja) * | 1999-12-20 | 2001-07-03 | Anelva Corp | プラズマ処理装置 |
| KR100397751B1 (ko) * | 2001-07-18 | 2003-09-13 | 한전건 | 자성체 재료 코팅용 마그네트론 원 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0216381B2 (enrdf_load_stackoverflow) | 1990-04-17 |
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