JPS61277581A - Conveyor for clean environment - Google Patents
Conveyor for clean environmentInfo
- Publication number
- JPS61277581A JPS61277581A JP11715085A JP11715085A JPS61277581A JP S61277581 A JPS61277581 A JP S61277581A JP 11715085 A JP11715085 A JP 11715085A JP 11715085 A JP11715085 A JP 11715085A JP S61277581 A JPS61277581 A JP S61277581A
- Authority
- JP
- Japan
- Prior art keywords
- moving path
- carrier
- air
- path
- clean environment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Types And Forms Of Lifts (AREA)
- Lift-Guide Devices, And Elevator Ropes And Cables (AREA)
- Ventilation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はクリーンルームに関連して配置され移動路内
の所要空気清浄度が要求される清浄環境用搬送装置の構
成に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the configuration of a conveying device for a clean environment, which is disposed in connection with a clean room and requires a required level of air cleanliness within a travel path.
クリーンルームの空気清浄化のために列えば「電設工業
」誌昭和５９年１２月号（Ｖｏｌ、３０ Ｎｏ、１２
）第４２頁他に一般クリーンルームの空気清浄化施設の
概要が示されている。しかし搬器が移動する筒状の移動
路を有する搬送装置における移動路内の空気清浄化に対
して、一般りリーンクルーム用の空気清浄化設備を適用
しても動電がよく所用の空気清浄度を得ろことは困難で
ある。If you line up to purify the air in a clean room, see the December 1980 issue of "Densetsu Kogyo" magazine (Vol. 30 No. 12).
) On page 42, an overview of air purification facilities for general clean rooms is shown. However, in order to clean the air in the movement path of a conveyor device that has a cylindrical movement path, the electrodynamics are insufficient even when air purification equipment for lean rooms is used. It is difficult to obtain.
搬器が移動する筒状の移動路内では空気清浄化のための
空気流が搬器の存在のために不規則になり移動路の空気
清浄度が低くなる問題点があった。In the cylindrical path through which the carrier moves, the airflow for air purification becomes irregular due to the presence of the carrier, resulting in a problem in which the air cleanliness of the path decreases.
この発明は上記問題点の解消を目的とするもので、移動
路内の所要の空気清浄度が容易に得られて塵埃による不
具合を生じない清浄環境用搬送装置を提供しようとする
ものである。The present invention is aimed at solving the above-mentioned problems, and is intended to provide a transport device for a clean environment that can easily obtain the required air cleanliness in the movement path and that does not cause problems due to dust.
この発明にかかわる清浄環境用搬送装置は空気清浄化の
ため搬器の移動経路を横切る空気流が形成される。In the clean environment transport device according to the present invention, an air flow is formed across the movement path of the transport device for air purification.
この発明では空気流が移動路の長手を横切゛って形成さ
れるため移動路内の空気流路が短くなり。In this invention, since the air flow is formed across the length of the travel path, the air flow path within the travel path is shortened.
まだ搬器による空気流の乱れが少なくなる。There is still less turbulence in the airflow caused by the carrier.
以下、第１．第２図によってこの発明の一実施例を説明
する。Below, Part 1. An embodiment of the present invention will be explained with reference to FIG.
図中、（１）は立設された移動路で、 （１ａ）は移
動路（１）の周壁、 （１ｂＸ１ｃ）はそれぞれ移動
路（１）横断方向の一側に設けられた出し入れ口で９
（１ｂ）は建物（図示しない）の１階用の出し入れ口
、 （１ｃ）は２階用の出し入れ口、（２）は出し入
れ口（１ｂＸ１ｃ）にそれぞれ設けられた上下引き戸、
（３）は移動路（１）頂部に設けられ駆動綱車（３ａ）
を持つ巻上機、（４）は移動路（１）内に立設されたレ
ール、（５）は移動路（１）内に配置された搬器で、
（５ａ）は搬器（５）に枢着されてレール（４）を挟
持した複数のローラからなる案内装置。In the figure, (1) is an erected moving path, (1a) is the peripheral wall of the moving path (1), and (1bX1c) is an inlet/outlet provided on one side of the moving path (1) in the transverse direction.
(1b) is an entrance for the first floor of a building (not shown), (1c) is an entrance for the second floor, (2) is an upper and lower sliding door provided at each entrance (1bX1c),
(3) is a driving sheave (3a) installed at the top of the travel path (1).
(4) is a rail installed in the moving path (1), (5) is a carrier placed in the moving path (1),
(5a) is a guide device consisting of a plurality of rollers that are pivotally connected to the carrier (5) and sandwich the rail (4).
（６）は搬器（５）に隣接し移動路（１）Ｋ配置された
つり合おもり、（７）は駆動綱車（３ａ）に巻き掛けら
れた一端に搬器（５）、他端につり合おもり（６）が連
結されたロープ、（８）は移動路（１１の長手に沿って
配置され周壁（１ａ）の−面と搬器（５）の移動経路と
の間に空間（９）を形成して設けられたＨＦｉＰＡ（Ｈ
ｉｇｈ ＥｉｆｆｉｃｉｅｎｃｙＰａｒｔｉｃｕｌａｔ
ｅ Ａｉｒ）フィルターからなるフィルター。(6) is a counterweight arranged on the moving path (1) K adjacent to the carrier (5), and (7) is a counterweight with the carrier (5) on one end wrapped around the driving sheave (3a) and the counterweight on the other end. The rope (8) to which the counterweight (6) is connected is arranged along the length of the moving path (11) to create a space (9) between the - side of the peripheral wall (1a) and the moving path of the carrier (5). HFiPA (H
igh Efficiency Particulate
e Air) filter.
（Ｉｌは移動路（１）の長手に沿って設けられて搬器（
５）。(Il is provided along the length of the moving path (1) and the carrier (
5).
つり合おもり（６）それぞれの移動経路の間に配置され
、フィルター（８）側の周壁（１ａ）と対向した周壁（
１ａ）との間に空間αυを形成して設けられたパンチン
グメタル等の多孔板α邊は移動路（１）の長手方向に互
いに離れて設けられた複数台の送風装置で、（１２ａ）
はフィルター（８）側の周壁（１ａ）に開口した送風装
置Ｑ３の吹出し管路、 （１２ｂ）は多孔板α１側の周
壁（１ａ）に開口した送風装置α２の吸込み管路、 （
１２ｃ）は送風装置αａの送風機で、矢印人をキ移動路
（１）のフィルター（８）と多孔板αｌの開における送
風装置ａ３による空気流、αりは搬器（５）によって搬
送される半導体等の搬送品である。The counterweight (6) is arranged between each moving path, and the peripheral wall (1a) on the filter (8) side and the opposing peripheral wall (
The perforated plate α, such as a perforated plate made of punching metal, provided with a space αυ formed between the moving path (1) and the moving path (1) is a plurality of air blowers installed apart from each other in the longitudinal direction of the moving path (12a).
(12b) is the air outlet pipe of the blower Q3 opened in the peripheral wall (1a) on the filter (8) side, (12b) is the suction pipe of the fan α2 opened in the peripheral wall (1a) on the perforated plate α1 side, (
12c) is the blower of the blower αa, and the arrow indicates the air flow by the blower a3 at the opening of the filter (8) of the moving path (1) and the perforated plate αl, and the arrow indicates the semiconductor transported by the carrier (5). etc. are transported goods.
すなわち９巻上機（３）が付勢されると駆動綱車（３ａ
）が回転し、ロープ（７）を介し搬器（５）がレール（
４）に案内されて昇降して搬送品αＪが一部の出し入れ
口（１ｂ）から他方の出し入れ口（１ｃ）へ搬送される
。In other words, when the 9 hoisting machine (3) is energized, the drive sheave (3a
) rotates, and the carrier (5) is attached to the rail (
4), the transported goods αJ are conveyed from one loading/unloading port (1b) to the other loading/unloading port (1c).
−万、搬送品０によって持込まれる塵埃等の移動路ｆｌ
ｌ内の塵埃をフィルター（８）によづて捕捉するため送
風装置α２が運転され移動路（１１が設けられた建物の
空気清浄度が維持される。すなわち送風機（１２ｃ）に
よって吹出し管路（１２ａ）を経て空間（９）に送風さ
れ一フィルター（８）によって清浄化された層状の空気
流人が搬器（５）の移動経路の長手を横切り。- 10,000, movement path fl of dust, etc. brought in by transported goods 0
The blower α2 is operated to capture the dust in the filter (8) to maintain the air cleanliness of the building in which the passage (11) is installed.In other words, the blower (12c) 12a) into the space (9) and purified by a filter (8), the layered air flows across the length of the moving path of the carrier (5).
多孔板α〔、空間αυを経て吸込み管路（１２ｂ）によ
り送風機（１２ｃ）へ還流する。このため移動路（１）
内。The air flows back to the blower (12c) via the perforated plate α and the space αυ through the suction pipe (12b). For this reason, travel route (1)
Inside.
特に搬器（５）の移動経路の横断方向における空気流の
流路長さが短く移動路（１）の所要個所、すなわち搬送
品αｊの移動経路個所において良好な空気清浄度を容易
に得ることができる。また搬器（５）の昇降によって一
時的に空気流入が乱れるものの、空気流人は搬器（５）
の移動経路の長手を横切るものであるため、搬器（５）
の通過後は早い時期に乱れが回復するので、空気流人の
乱れるよる空気清浄度の低下を防ぐことができる。In particular, the length of the air flow path in the transverse direction of the moving path of the carrier (5) is short, making it easy to obtain good air cleanliness at required locations on the moving path (1), that is, along the moving path of the conveyed product αj. can. In addition, although the air inflow is temporarily disturbed by the lifting and lowering of the carrier (5), the airflow
Because it crosses the length of the moving route of the carrier (5)
Since the turbulence recovers quickly after the passage of the air, it is possible to prevent a decrease in air cleanliness caused by air turbulence.
以上説明したとおりこの発明は搬器が移動する筒状の移
動路に、搬器の移動経路を横切る空気流を発生する送風
装置を設け、また移動路の周壁の長手に沿って設けられ
て上記空気流の吹出し側に配置されたフィルターを設け
たものである。このため移動路内の移動路横断方向にお
ける空気流の流路長さが短く搬器の移動経路において良
好な空気清浄度を得ることができる。空気流が移動路の
長手を横切って形成されるので、搬器の通過後は早期に
空気流の乱れがなくなって空気流の乱れによる空気清浄
度の低下の少ない清浄環境用搬送装置を実現するもので
ある。As explained above, the present invention provides a cylindrical moving path along which a carrier moves, with an air blower that generates an air flow that crosses the moving path of the carrier, and a blower device that is provided along the length of the peripheral wall of the moving path to allow the air to flow. It is equipped with a filter placed on the outlet side. Therefore, the passage length of the air flow in the cross direction of the movement path is short, and good air cleanliness can be obtained in the movement path of the carrier. Since the airflow is formed across the length of the movement path, turbulence in the airflow disappears quickly after the carrier has passed, thereby realizing a conveyance device for clean environments with less deterioration in air cleanliness due to turbulence in the airflow. It is.
第１図はこの発明による清浄環境用搬送装置の一実施例
を示す図で一部を縦断して示す正面概念図、第２図は第
１図の■−■線断面拡大図である。
（１１・・・移動路、 （１ａ）・・・周壁、 （
１ｂＸ１ｃ）・・・出し入れ口、（５）・・・搬器、（
８）はフィルター、ａの・・・送風装置。
（１２ａ）・・・吹出し管路
なお２図中同一部分は同一符号により示す。FIG. 1 is a conceptual front view showing an embodiment of a conveying device for a clean environment according to the present invention, with a part thereof being longitudinally sectional, and FIG. 2 is an enlarged cross-sectional view taken along the line ■--■ in FIG. 1. (11...Movement path, (1a)...Peripheral wall, (
1bX1c)...Input/outlet, (5)...Carrier, (
8) is a filter, and a... air blower. (12a)...Blowout pipe The same parts in the two figures are indicated by the same reference numerals.
Claims (1)
れた移動路と、この移動路内を長手に沿って移動する搬
器と、上記移動路に設けられて上記移動路の長手を横切
る空気流を発生する送風装置と、上記空気流の吹出し側
に設けられて上記周壁に沿って配置されたフィルターと
を備えた清浄環境用搬送装置。A moving path that is cylindrical with a surrounding wall and has entrances and exits at key points, a carrier that moves along the length within this moving path, and a carrier that is provided in the moving path and crosses the longitudinal direction of the moving path. A conveyance device for a clean environment, comprising: a blower device that generates an air flow; and a filter provided on the outlet side of the air flow and arranged along the peripheral wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11715085A JPS61277581A (en) | 1985-05-30 | 1985-05-30 | Conveyor for clean environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11715085A JPS61277581A (en) | 1985-05-30 | 1985-05-30 | Conveyor for clean environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61277581A true JPS61277581A (en) | 1986-12-08 |
| JPH0438676B2 JPH0438676B2 (en) | 1992-06-25 |
Family
ID=14704697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11715085A Granted JPS61277581A (en) | 1985-05-30 | 1985-05-30 | Conveyor for clean environment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61277581A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110398041A (en) * | 2019-07-24 | 2019-11-01 | 同济大学建筑设计研究院(集团)有限公司 | Super high-rise building elevator shuttle vertical shaft cold wind mends exhaust system and methods of air quantity estimation |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS47436U (en) * | 1971-01-20 | 1972-08-02 |
-
1985
- 1985-05-30 JP JP11715085A patent/JPS61277581A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS47436U (en) * | 1971-01-20 | 1972-08-02 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110398041A (en) * | 2019-07-24 | 2019-11-01 | 同济大学建筑设计研究院(集团)有限公司 | Super high-rise building elevator shuttle vertical shaft cold wind mends exhaust system and methods of air quantity estimation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0438676B2 (en) | 1992-06-25 |
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