JPS61282224A - Put-in/out port device of carrying apparatus - Google Patents

Abstract

PURPOSE:To block flow in of dust through sliding door into the carrying path, in put-in/out device of carrying apparatus arranged in clean room, by discharging air in the groove portion of edge structural member of put-in/out device through discharging device. CONSTITUTION:It is comprising a carrying unit movable on a carrying path 1 surrounded by the circumferential wall 1a while provided with a put-in/out port 2 at proper position, an air cleaner 12 and a sliding door 2c for opening/ closing said port. Upon enerzination of discharging unit 14, the air in the groove section 2b is discharged through pump to clean environment. Consequently, dust produced through operation of the sliding door 2c is sucked together with the air in the moving path 1 and discharged through the groove section 2b. As a result, deterioration of cleanliness due to dust produced through operation of the sliding door 2c can be prevented to maintain necessary cleanliness easily.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to the configuration of an inlet device that generates little dust and is installed in a conveying device installed in a clean environment, a so-called clean room. It is.

[Conventional technology]

First, by referring to Figures 2 to 4, for example,
A conventional conveyance device in which a door opening/closing device similar to the one shown in Japanese Patent No. 74 is provided at the entrance/exit will be described.

In the figure, (1) is an erected moving path, (1a) is the peripheral wall of the moving path (1), +21 (2') is an inlet/outlet provided on the negative side peripheral wall (1a), and ( 2) is the entrance/exit for the first floor of the building (not shown), (2')
is the entrance/exit for the second floor, (2a) is the entrance/exit +2
1 (2') is provided on the edge along the vertical direction.
b) is a recessed guide v-pw, (2c) is a sliding door whose both edges are movably fitted to #1 (21)), (2d) is a sliding door that is fixed to the surrounding wall (1a) The driving mechanism (3) is a drive mechanism consisting of a near cylinder that opens and closes the sliding door (2c) vertically, connected to the sliding door (2C).
), (4) is a rail installed vertically in the moving path (1), (5) is a carrier placed in the moving path (1),
(5a) is a guide device consisting of a plurality of rollers that are pivotally connected to the carrier (5) and clamps the rail (4); (6) is a guide device that is adjacent to the carrier (51) and is arranged on the moving path (11); .

(7) is a rope that is wrapped around the driving sheave (3a) and has one end connected to a handler (5) and the other end connected to a counterweight (6).

(8) is arranged along the length of the movement path (11
Busy space (9) between the negative side of a) and the moving route of the carrier (5)
H K P A (Hlgh F
! ff1science ParticulateθAir
) A filter consisting of filters.

The moose is provided along the length of the moving path (1) and the carriage (15
1.

The peripheral wall (1a) of the filter (8) # and the peripheral wall (
1a) A perforated plate such as a punched metal plate arranged to form a space between the air purifier and the filter (8), which is mainly composed of a blower and a filter (8), which are provided in correspondence with the movement path (1). In the device, (12a) is the peripheral wall (1a) on the side of the filter (8) and the outlet pipe of the air purifying device a with the IC opening.

(12b) is the suction pipe of the air purifier 02 with the perforated plate (IO side peripheral wall (1a) K open), (12c) is the blower of the air purifier a2; arrow A is the filter (81 and porous Air cleaning device U between plate α
The air flow is caused by K, and α9 is the product such as a semiconductor that is transported by the carrier (5).

In other words, the first hoist (3) is energized and the driving sheave (3a)
rotates, and the carrier (5) is connected to the rail (4) via the rope (7).
), the transported goods (13) are transported from one entrance/exit (2) to the other entrance/exit (2), and the sliding door (2C) is opened and closed along with the transport. The air purifier α2 is used to capture dust that enters the movement path (11) by the transported goods (13, etc.) by the filter (81).
is operated, and the filter (
8) Cleaned from the nine-layered air flow path (1)
) air cleanliness is maintained.

[Problem that the invention seeks to solve]

In the conventional conveying device as described above, although the air on the moving path (11) is purified by the filter (8) etc., the movement of the sliding door (2C) mainly cleans the air on the guide rail (2a).
) There was a problem in that air cleanliness of the travel route (1) decreased due to dust generation.

The present invention aims to solve the above-mentioned problems and provides an inlet/outlet device for a conveying device in which the air cleanliness is less degraded due to the sliding doors of nine inlet/outlet openings.

[Means for solving problems]

In the entrance/exit device for a conveying device according to the present invention, an edge structure having a groove-like part is provided at the entrance/exit, into which the edge of the sliding door fits, and an exhaust gas has a suction part opened in the groove-like part. A device is provided.

[Effect]

In this invention, the exhaust device exhausts the air in the groove in the edge structure of the entrance and exit, thereby preventing dust from flowing into the path of movement by the sliding door.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

In the figure, the same reference numerals as in FIGS. 2 to 4 indicate corresponding parts.

(2a) is provided at the edge along the operating direction of the sliding door (2c) of the entrance/exit [2] and opens at -9.
) an edge structure having a groove (2b) with which the edge is movably engaged; (141 is an exhaust device fixed to the peripheral wall (1a); (14a) is an edge structure (2a); an inlet of the exhaust device I, which is open to the groove bottom surface of the groove-shaped portion (2b) and arranged apart from each other along the length of the edge structure (2a);
(14b) is the exhaust part of the exhaust device α4 which is piped to outside the clean environment.

That is, the exhaust device a4 is energized and its pump (not shown) exhausts the air in the groove (2b) to the outside of the clean environment. Due to this button, the dust generated by the operation button of the sliding door (2c) is sucked together with the air in the moving path (1) and is discharged through the groove-shaped portion (2b). Therefore, the entrance +
21 (It is possible to prevent a decrease in air cleanliness caused by dust generated when the two sliding doors (2c) are operated, etc., and it is possible to easily maintain the required air cleanliness.

〔Effect of the invention〕

As explained above, the present invention includes a carrier that moves along a path surrounded by a peripheral wall and provided with entrances and exits at appropriate locations, an air purifier that cleans the path, and a sliding door that opens and closes the entrance. is provided with a groove-like part into which the edge of the sliding door is movably fitted, and an edge structure disposed along the operating direction of the sliding door at the edge of the entrance and exit, and an inlet. An exhaust device is provided in which a portion opens into the groove-shaped portion and exhausts air from the groove-shaped portion. As a result, dust generated by the sliding door is sucked together with the air in the movement path and is discharged through the groove-shaped portion. Therefore, it is possible to prevent a decrease in air cleanliness due to dust generated by the sliding door.

The purpose of the present invention is to realize an inlet/outlet device for a conveyance device that can easily obtain the required air cleanliness.

[Brief explanation of drawings]

FIG. 1 is a view corresponding to FIG. 3, which will be described later, showing an embodiment of the inlet/outlet device of the conveying device according to the present invention. FIG. 2 is a conceptual front view showing a conventional conveying device partially longitudinally, and FIG. 3 is an enlarged cross-sectional view taken along the line ■-■ in FIG. FIG. 4 is a sectional view taken along the line IV-IV in FIG. 3. +11...Movement path, (1a)...Peripheral wall, +2
1 (2')... Input/outlet opening, (2a)-0 edge structure, (21))..., groove e (2c)...
・Sliding door, (5)...Carrier, α2...Air cleaning device, α4...Exhaust device, (14a3...Intake part. In addition, the same or equivalent parts in Figure 9 are indicated by the same symbols. 2 Figure

Claims (1)

[Claims] A moving path surrounded by a peripheral wall and provided with an inlet/outlet at a suitable position on the surrounding wall, a carrier that moves along this moving path and stops opposite to the inlet/outlet, and an air purifier that cleans the inside of the moving path. and a sliding door that opens and closes the access port, wherein the door is provided at an edge of the access port along the operating direction of the sliding door and opens on one longitudinal side, and the edge of the sliding door is fitted. A method for loading and unloading a conveyance device, characterized in that it is equipped with an edge structure having a straight-shaped part, and an exhaust device having a suction part opening in a groove of the edge structure and discharging air in the groove. Mouth apparatus.