JPS6127535A - 感光性樹脂組成物 - Google Patents
感光性樹脂組成物Info
- Publication number
- JPS6127535A JPS6127535A JP14873484A JP14873484A JPS6127535A JP S6127535 A JPS6127535 A JP S6127535A JP 14873484 A JP14873484 A JP 14873484A JP 14873484 A JP14873484 A JP 14873484A JP S6127535 A JPS6127535 A JP S6127535A
- Authority
- JP
- Japan
- Prior art keywords
- compound
- photosensitive resin
- resin composition
- compd
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14873484A JPS6127535A (ja) | 1984-07-17 | 1984-07-17 | 感光性樹脂組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14873484A JPS6127535A (ja) | 1984-07-17 | 1984-07-17 | 感光性樹脂組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6127535A true JPS6127535A (ja) | 1986-02-07 |
| JPH036496B2 JPH036496B2 (cg-RX-API-DMAC7.html) | 1991-01-30 |
Family
ID=15459413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14873484A Granted JPS6127535A (ja) | 1984-07-17 | 1984-07-17 | 感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127535A (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6311930A (ja) * | 1986-07-03 | 1988-01-19 | Mitsui Toatsu Chem Inc | 感光性樹脂組成物 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830748A (ja) * | 1981-08-07 | 1983-02-23 | バスフ・アクチエンゲゼルシヤフト | フオトレジスト層の製造に適する光重合性印画用組成物 |
-
1984
- 1984-07-17 JP JP14873484A patent/JPS6127535A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830748A (ja) * | 1981-08-07 | 1983-02-23 | バスフ・アクチエンゲゼルシヤフト | フオトレジスト層の製造に適する光重合性印画用組成物 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6311930A (ja) * | 1986-07-03 | 1988-01-19 | Mitsui Toatsu Chem Inc | 感光性樹脂組成物 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH036496B2 (cg-RX-API-DMAC7.html) | 1991-01-30 |
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