JPS61270372A - 人工ダイヤモンド皮膜の析出形成方法 - Google Patents

人工ダイヤモンド皮膜の析出形成方法

Info

Publication number
JPS61270372A
JPS61270372A JP11068785A JP11068785A JPS61270372A JP S61270372 A JPS61270372 A JP S61270372A JP 11068785 A JP11068785 A JP 11068785A JP 11068785 A JP11068785 A JP 11068785A JP S61270372 A JPS61270372 A JP S61270372A
Authority
JP
Japan
Prior art keywords
artificial diamond
diamond film
strain
width
diffraction line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11068785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644586B2 (enrdf_load_stackoverflow
Inventor
Noribumi Kikuchi
菊池　則文
Tetsuo Komatsu
哲郎 小松
Hiroaki Yamashita
山下　博明
Hironori Yoshimura
吉村　寛範
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp, Research Development Corp of Japan filed Critical Mitsubishi Metal Corp
Priority to JP11068785A priority Critical patent/JPS61270372A/ja
Publication of JPS61270372A publication Critical patent/JPS61270372A/ja
Publication of JPS644586B2 publication Critical patent/JPS644586B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11068785A 1985-05-23 1985-05-23 人工ダイヤモンド皮膜の析出形成方法 Granted JPS61270372A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11068785A JPS61270372A (ja) 1985-05-23 1985-05-23 人工ダイヤモンド皮膜の析出形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11068785A JPS61270372A (ja) 1985-05-23 1985-05-23 人工ダイヤモンド皮膜の析出形成方法

Publications (2)

Publication Number Publication Date
JPS61270372A true JPS61270372A (ja) 1986-11-29
JPS644586B2 JPS644586B2 (enrdf_load_stackoverflow) 1989-01-26

Family

ID=14541900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11068785A Granted JPS61270372A (ja) 1985-05-23 1985-05-23 人工ダイヤモンド皮膜の析出形成方法

Country Status (1)

Country Link
JP (1) JPS61270372A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6110240A (en) * 1996-05-31 2000-08-29 Ngk Spark Plug Co., Ltd. Superhard article with diamond coat and method of manufacturing same
BE1016881A3 (fr) * 2004-07-09 2007-09-04 Ngk Insulators Ltd Matrice de moulage d'une structure alveolee et procede de fabrication de celle-ci.

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02272374A (ja) * 1989-04-13 1990-11-07 Tokyo Electron Ltd 半導体検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086096A (ja) * 1983-10-18 1985-05-15 Natl Inst For Res In Inorg Mater 膜状ダイヤモンドの析出法
JPS61124573A (ja) * 1984-11-21 1986-06-12 Toshiba Tungaloy Co Ltd ダイヤモンド被覆基材及びその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086096A (ja) * 1983-10-18 1985-05-15 Natl Inst For Res In Inorg Mater 膜状ダイヤモンドの析出法
JPS61124573A (ja) * 1984-11-21 1986-06-12 Toshiba Tungaloy Co Ltd ダイヤモンド被覆基材及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6110240A (en) * 1996-05-31 2000-08-29 Ngk Spark Plug Co., Ltd. Superhard article with diamond coat and method of manufacturing same
BE1016881A3 (fr) * 2004-07-09 2007-09-04 Ngk Insulators Ltd Matrice de moulage d'une structure alveolee et procede de fabrication de celle-ci.
US7384258B2 (en) 2004-07-09 2008-06-10 Ngk Insulators, Ltd. Die for forming honeycomb structure, and method of manufacturing the same

Also Published As

Publication number Publication date
JPS644586B2 (enrdf_load_stackoverflow) 1989-01-26

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