JPS61269840A - 電子顕微鏡等における試料移動装置 - Google Patents

電子顕微鏡等における試料移動装置

Info

Publication number
JPS61269840A
JPS61269840A JP60109658A JP10965885A JPS61269840A JP S61269840 A JPS61269840 A JP S61269840A JP 60109658 A JP60109658 A JP 60109658A JP 10965885 A JP10965885 A JP 10965885A JP S61269840 A JPS61269840 A JP S61269840A
Authority
JP
Japan
Prior art keywords
sample
sample stage
optical axis
stage
flat springs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60109658A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234148B2 (enrdf_load_stackoverflow
Inventor
Haruyuki Okabe
岡部　春幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60109658A priority Critical patent/JPS61269840A/ja
Publication of JPS61269840A publication Critical patent/JPS61269840A/ja
Publication of JPH0234148B2 publication Critical patent/JPH0234148B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP60109658A 1985-05-22 1985-05-22 電子顕微鏡等における試料移動装置 Granted JPS61269840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60109658A JPS61269840A (ja) 1985-05-22 1985-05-22 電子顕微鏡等における試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60109658A JPS61269840A (ja) 1985-05-22 1985-05-22 電子顕微鏡等における試料移動装置

Publications (2)

Publication Number Publication Date
JPS61269840A true JPS61269840A (ja) 1986-11-29
JPH0234148B2 JPH0234148B2 (enrdf_load_stackoverflow) 1990-08-01

Family

ID=14515868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60109658A Granted JPS61269840A (ja) 1985-05-22 1985-05-22 電子顕微鏡等における試料移動装置

Country Status (1)

Country Link
JP (1) JPS61269840A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0234148B2 (enrdf_load_stackoverflow) 1990-08-01

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