JPH0234148B2 - - Google Patents

Info

Publication number
JPH0234148B2
JPH0234148B2 JP60109658A JP10965885A JPH0234148B2 JP H0234148 B2 JPH0234148 B2 JP H0234148B2 JP 60109658 A JP60109658 A JP 60109658A JP 10965885 A JP10965885 A JP 10965885A JP H0234148 B2 JPH0234148 B2 JP H0234148B2
Authority
JP
Japan
Prior art keywords
sample
sample stage
optical axis
leaf springs
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60109658A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61269840A (ja
Inventor
Haruyuki Okabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP60109658A priority Critical patent/JPS61269840A/ja
Publication of JPS61269840A publication Critical patent/JPS61269840A/ja
Publication of JPH0234148B2 publication Critical patent/JPH0234148B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP60109658A 1985-05-22 1985-05-22 電子顕微鏡等における試料移動装置 Granted JPS61269840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60109658A JPS61269840A (ja) 1985-05-22 1985-05-22 電子顕微鏡等における試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60109658A JPS61269840A (ja) 1985-05-22 1985-05-22 電子顕微鏡等における試料移動装置

Publications (2)

Publication Number Publication Date
JPS61269840A JPS61269840A (ja) 1986-11-29
JPH0234148B2 true JPH0234148B2 (enrdf_load_stackoverflow) 1990-08-01

Family

ID=14515868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60109658A Granted JPS61269840A (ja) 1985-05-22 1985-05-22 電子顕微鏡等における試料移動装置

Country Status (1)

Country Link
JP (1) JPS61269840A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61269840A (ja) 1986-11-29

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