JPS61263502A - 清浄化装置 - Google Patents

清浄化装置

Info

Publication number
JPS61263502A
JPS61263502A JP10429985A JP10429985A JPS61263502A JP S61263502 A JPS61263502 A JP S61263502A JP 10429985 A JP10429985 A JP 10429985A JP 10429985 A JP10429985 A JP 10429985A JP S61263502 A JPS61263502 A JP S61263502A
Authority
JP
Japan
Prior art keywords
air
cassette
section
storage
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10429985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0476882B2 (enFirst
Inventor
Hiromi Kumagai
熊谷　浩洋
Tamio Endo
民夫 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP10429985A priority Critical patent/JPS61263502A/ja
Publication of JPS61263502A publication Critical patent/JPS61263502A/ja
Publication of JPH0476882B2 publication Critical patent/JPH0476882B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
JP10429985A 1985-05-16 1985-05-16 清浄化装置 Granted JPS61263502A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10429985A JPS61263502A (ja) 1985-05-16 1985-05-16 清浄化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10429985A JPS61263502A (ja) 1985-05-16 1985-05-16 清浄化装置

Publications (2)

Publication Number Publication Date
JPS61263502A true JPS61263502A (ja) 1986-11-21
JPH0476882B2 JPH0476882B2 (enFirst) 1992-12-04

Family

ID=14377045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10429985A Granted JPS61263502A (ja) 1985-05-16 1985-05-16 清浄化装置

Country Status (1)

Country Link
JP (1) JPS61263502A (enFirst)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02265802A (ja) * 1989-04-06 1990-10-30 Matsushita Electron Corp ストッカ装置
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4412591Y1 (enFirst) * 1965-06-14 1969-05-26
JPS567437U (enFirst) * 1979-06-29 1981-01-22
JPS57156903A (en) * 1981-03-23 1982-09-28 Hitachi Ltd Automatic stockpiler for products
JPS605488U (ja) * 1983-06-24 1985-01-16 株式会社椿本チエイン 回転棚式清浄装置
JPS6044404A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd クリ−ンル−ム内の荷保管設備

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4412591Y1 (enFirst) * 1965-06-14 1969-05-26
JPS567437U (enFirst) * 1979-06-29 1981-01-22
JPS57156903A (en) * 1981-03-23 1982-09-28 Hitachi Ltd Automatic stockpiler for products
JPS605488U (ja) * 1983-06-24 1985-01-16 株式会社椿本チエイン 回転棚式清浄装置
JPS6044404A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd クリ−ンル−ム内の荷保管設備

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers
JPH02265802A (ja) * 1989-04-06 1990-10-30 Matsushita Electron Corp ストッカ装置

Also Published As

Publication number Publication date
JPH0476882B2 (enFirst) 1992-12-04

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