JPS61261285A - 半導体装置用基板の製造方法 - Google Patents

半導体装置用基板の製造方法

Info

Publication number
JPS61261285A
JPS61261285A JP60101922A JP10192285A JPS61261285A JP S61261285 A JPS61261285 A JP S61261285A JP 60101922 A JP60101922 A JP 60101922A JP 10192285 A JP10192285 A JP 10192285A JP S61261285 A JPS61261285 A JP S61261285A
Authority
JP
Japan
Prior art keywords
semiconductor film
substrate
crystal grains
film
channeling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60101922A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0240039B2 (enExample
Inventor
Atsushi Ogura
厚志 小椋
Koji Egami
江上　浩二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60101922A priority Critical patent/JPS61261285A/ja
Publication of JPS61261285A publication Critical patent/JPS61261285A/ja
Publication of JPH0240039B2 publication Critical patent/JPH0240039B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP60101922A 1985-05-14 1985-05-14 半導体装置用基板の製造方法 Granted JPS61261285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60101922A JPS61261285A (ja) 1985-05-14 1985-05-14 半導体装置用基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60101922A JPS61261285A (ja) 1985-05-14 1985-05-14 半導体装置用基板の製造方法

Publications (2)

Publication Number Publication Date
JPS61261285A true JPS61261285A (ja) 1986-11-19
JPH0240039B2 JPH0240039B2 (enExample) 1990-09-10

Family

ID=14313400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60101922A Granted JPS61261285A (ja) 1985-05-14 1985-05-14 半導体装置用基板の製造方法

Country Status (1)

Country Link
JP (1) JPS61261285A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5318661A (en) * 1990-08-08 1994-06-07 Canon Kabushiki Kaisha Process for growing crystalline thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5318661A (en) * 1990-08-08 1994-06-07 Canon Kabushiki Kaisha Process for growing crystalline thin film

Also Published As

Publication number Publication date
JPH0240039B2 (enExample) 1990-09-10

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