JPS6125993A - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS6125993A
JPS6125993A JP14439084A JP14439084A JPS6125993A JP S6125993 A JPS6125993 A JP S6125993A JP 14439084 A JP14439084 A JP 14439084A JP 14439084 A JP14439084 A JP 14439084A JP S6125993 A JPS6125993 A JP S6125993A
Authority
JP
Japan
Prior art keywords
vane
blade
rotor
blades
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14439084A
Other languages
English (en)
Japanese (ja)
Other versions
JPS647234B2 (enrdf_load_stackoverflow
Inventor
Toshio Kusumoto
淑郎 楠本
Hiroyuki Yamakawa
洋幸 山川
Hisahiro Terasawa
寿浩 寺澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP14439084A priority Critical patent/JPS6125993A/ja
Publication of JPS6125993A publication Critical patent/JPS6125993A/ja
Publication of JPS647234B2 publication Critical patent/JPS647234B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP14439084A 1984-07-13 1984-07-13 タ−ボ分子ポンプ Granted JPS6125993A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14439084A JPS6125993A (ja) 1984-07-13 1984-07-13 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14439084A JPS6125993A (ja) 1984-07-13 1984-07-13 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6125993A true JPS6125993A (ja) 1986-02-05
JPS647234B2 JPS647234B2 (enrdf_load_stackoverflow) 1989-02-08

Family

ID=15361026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14439084A Granted JPS6125993A (ja) 1984-07-13 1984-07-13 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6125993A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6499942B1 (en) 1998-11-24 2002-12-31 Seiko Instruments Inc. Turbomolecular pump and vacuum apparatus
WO2008065798A1 (fr) * 2006-11-30 2008-06-05 Edwards Japan Limited Pompe à vide
EP1580435A3 (de) * 2004-03-16 2009-12-30 Pfeiffer Vacuum GmbH Turbomolekularpumpe

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018173341A1 (ja) * 2017-03-23 2018-09-27 エドワーズ株式会社 真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791396A (en) * 1980-11-28 1982-06-07 Mitsubishi Heavy Ind Ltd Rotary cylinder type molecular pump
JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791396A (en) * 1980-11-28 1982-06-07 Mitsubishi Heavy Ind Ltd Rotary cylinder type molecular pump
JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6499942B1 (en) 1998-11-24 2002-12-31 Seiko Instruments Inc. Turbomolecular pump and vacuum apparatus
EP1580435A3 (de) * 2004-03-16 2009-12-30 Pfeiffer Vacuum GmbH Turbomolekularpumpe
WO2008065798A1 (fr) * 2006-11-30 2008-06-05 Edwards Japan Limited Pompe à vide

Also Published As

Publication number Publication date
JPS647234B2 (enrdf_load_stackoverflow) 1989-02-08

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