WO2008065798A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
WO2008065798A1
WO2008065798A1 PCT/JP2007/068070 JP2007068070W WO2008065798A1 WO 2008065798 A1 WO2008065798 A1 WO 2008065798A1 JP 2007068070 W JP2007068070 W JP 2007068070W WO 2008065798 A1 WO2008065798 A1 WO 2008065798A1
Authority
WO
WIPO (PCT)
Prior art keywords
blade
rotating
particles
vacuum pump
gas
Prior art date
Application number
PCT/JP2007/068070
Other languages
English (en)
Japanese (ja)
Inventor
Takashi Kabasawa
Yoshiyuki Sakaguchi
Original Assignee
Edwards Japan Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Limited filed Critical Edwards Japan Limited
Priority to JP2008546901A priority Critical patent/JP5463037B2/ja
Publication of WO2008065798A1 publication Critical patent/WO2008065798A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/524—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps shiftable members for obturating part of the flow path
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/20—Rotors
    • F05D2240/30—Characteristics of rotor blades, i.e. of any element transforming dynamic fluid energy to or from rotational energy and being attached to a rotor
    • F05D2240/303—Characteristics of rotor blades, i.e. of any element transforming dynamic fluid energy to or from rotational energy and being attached to a rotor related to the leading edge of a rotor blade
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Definitions

  • the present invention relates to, for example, a vacuum pump that performs evacuation processing of a vacuum vessel, and more particularly, to a vacuum pump having a structure that prevents backflow of particles to a vacuum container.
  • Vacuum pumps such as turbo molecular pumps and thread groove pumps are widely used in, for example, vacuum vessels that require high vacuum, such as exhaust of semiconductor manufacturing equipment and electron microscopes.
  • a vacuum pump that realizes this high vacuum environment includes a casing that forms an exterior body having an intake port and an exhaust port. And inside the casing, there is housed a structure that allows the vacuum pump to exert its exhaust function!
  • a structure that exhibits this exhaust function is roughly composed of a rotating part (rotor part) rotatably supported by a shaft and a fixed part (stator part) fixed to the casing.
  • a rotating part is composed of a rotating shaft and a rotating body fixed to the rotating shaft, and rotor blades provided with radial blades are arranged in multiple stages on the rotating body. Yes.
  • stator blades are arranged in multiple stages in the fixed portion alternately with respect to the rotor blades.
  • a motor for rotating the rotating shaft at high speed is provided.
  • gas is sucked from the intake port by the action of the rotor blade and the stator blade, and the exhaust port Power is being discharged.
  • particles generated in the vacuum container such as fine particles made of reaction products generated in the process chamber of the semiconductor manufacturing apparatus are also taken into the vacuum pump only from the gas in the vacuum container.
  • Patent Document 1 Japanese Unexamined Patent Application Publication No. 2006-307823
  • FIG. 5 is a developed view schematically showing the rotor blades in the turbo molecular pump proposed in Patent Document 1. As shown in FIG.
  • Patent Document 1 discloses a rotor blade formed such that a surface 108a of a blade 108 is parallel to the direction of the rotation axis, as shown in FIG.
  • FIG. 6 (a) shows an example of the movement path of gas molecules entering the rotor blades from the inlet side when the blade 108 is not processed
  • Fig. 6 (b) shows the blade 10 8 is a diagram showing an example of a movement path of gas molecules incident on a rotor blade from the inlet side when processing is performed on FIG.
  • FIG. 7 (a) is a diagram showing an example of the movement path of gas molecules incident on the rotor blades from the exhaust port side when the blade 108 is not processed.
  • FIG. 4 is a diagram showing an example of a movement path of gas molecules incident on a rotor blade from an exhaust port side when a blade is processed. 6 and 7 show the state when gas molecules are incident from one power point in order to avoid complicated explanation.
  • FIG. 6 (a) When FIG. 6 (a) is compared with FIG. 6 (b), the processing of the blade 108 reduces the probability (Ml 2) that gas molecules pass from the intake port side to the exhaust port side. I understand.
  • Exhaust velocity C X (M12— ⁇ 21) ⁇ 1 where C is the number of incident gas molecules.
  • the present invention provides a vacuum pump that can appropriately prevent the backflow of particles (particles) to the upstream region of the intake port without significantly reducing the exhaust performance. To do.
  • an exterior body having an intake port and an exhaust port, a rotating body included in the exterior body and rotating at high speed, and a moving blade row having a blade angle provided in the rotating body are provided.
  • the rotating blade is, for example, protruded from at least one part of the side surface of the rotating body so as to be inclined with respect to the rotation axis direction, and faces the inlet side. It is preferable that the corner portion formed by the surface and the surface facing the rotation direction has a chamfered surface that is parallel to the axial direction of the rotating body or a surface facing the exhaust direction.
  • the rotating blade includes, for example, a surface facing an upstream direction of a gas transferred from the intake port to the exhaust port and a surface facing a downstream direction of the gas.
  • a chamfered surface having a surface parallel to the axial direction of the rotating body or a surface facing the downstream direction of the gas is formed at the corner formed on the inlet side. It is preferable.
  • the vacuum pump is a device that performs an evacuation process of a vacuum vessel, and the rotating blade is at least the interval between the adjacent rotating blades and the rotation.
  • the chamfered surface is formed in a colliding area of particles flying from the vacuum vessel, which is specified based on the moving speed of the blade and the moving speed of the particles.
  • the chamfered surface is formed only in a collision possible region, for example!
  • the vacuum pump according to the first or second aspect of the fixed portions forming the flow path of the gas transferred from the intake port to the exhaust port, the parallel to the axial direction.
  • a backflow prevention surface facing the downstream direction of the gas is formed in a region having a side surface.
  • a stationary blade row fixed to the exterior body, and a positioning function of the stationary blade row, provided inside the exterior body.
  • the backflow prevention surface is provided on at least one of the inner wall surface of the spacer and the exterior body.
  • the invention according to claim 5 is characterized in that, in the vacuum pump according to claim 3 or claim 4, the backflow prevention surface forms a V-shaped groove with a surface orthogonal to the rotation axis. To do.
  • the invention's effect is characterized in that, in the vacuum pump according to claim 3 or claim 4, the backflow prevention surface forms a V-shaped groove with a surface orthogonal to the rotation axis. To do. The invention's effect
  • the present invention by forming a chamfered surface facing the direction in which particles do not flow backward at the corner portion on the inlet side of the rotating blade, the backflow of particles is prevented at a portion where the incidence of particles is concentrated. Therefore, the backflow of particles can be efficiently prevented without significantly reducing the exhaust performance.
  • FIG. 1 is a diagram showing a schematic configuration of a turbo molecular pump according to the present embodiment.
  • FIG. 2 is a development view schematically showing a part of a moving blade row in the turbo molecular pump according to the present embodiment.
  • FIG. 3 is an explanatory diagram for explaining a method of calculating a collision possible region L.
  • FIG. 4 is an enlarged view of the rupture part A in FIG.
  • FIG. 5 is a development view schematically showing rotor blades in a turbo molecular pump proposed in Patent Document 1.
  • FIG. 6 (a) is a diagram showing an example of the movement path of gas molecules incident on the rotor blades from the air inlet side when the blade is not processed, and (b) is a diagram showing the blade being processed.
  • FIG. 5 is a diagram showing an example of a movement path of gas molecules incident on a rotor blade from the inlet side in the case of
  • FIG. 7 (a) is a diagram showing an example of a movement path of gas molecules incident on the rotor blades from the exhaust port side when the blade is not processed, and (b) is a diagram showing the processing of the blade.
  • FIG. 5 is a diagram showing an example of a movement path of gas molecules incident on a rotor blade from the exhaust port side in the case of
  • FIG. 1 is a diagram showing a schematic configuration of a turbo molecular pump 1 according to the present embodiment.
  • FIG. 1 shows a cross-sectional view of the turbo molecular pump 1 in the axial direction.
  • turbo molecular pump As an example of a turbo molecular pump, a so-called composite wing type molecular pump including a turbo molecular pump part T and a thread groove type pump part S will be described as an example. Note that the present embodiment may be applied to a pump having only the turbo-molecular pump portion T or a pump having a thread groove provided on the rotating body side.
  • the casing 2 forming the exterior body of the turbo molecular pump 1 has a cylindrical shape, and constitutes the exterior body of the turbo molecular pump 1 together with the base 3 provided at the bottom of the casing 2.
  • a structure that allows the turbo molecular pump 1 to perform an exhaust function, that is, a gas transfer mechanism, is housed inside the exterior of the turbo molecular pump 1.
  • These structures that exhibit the exhaust function are roughly composed of a rotor portion 4 that is rotatably supported and a stator portion that is fixed to the casing 2.
  • the intake port 5 side is composed of a turbo-molecular pump part T
  • the exhaust port 6 side is composed of a thread groove type pump part S! /.
  • the rotor section 4 includes a moving blade row 8 composed of a plurality of rotating blades 28 inclined at a predetermined angle from a plane perpendicular to the axis of the shaft 7 and extending radially from the shaft 7, on the intake port 5 side ( It is installed in the turbo molecular pump section T).
  • the rotor portion 4 is made of a metal such as stainless steel or aluminum alloy.
  • the rotor part 4 is provided with a cylindrical member 9 made of a member having a cylindrical outer peripheral surface on the exhaust port 6 side (screw groove type pump part S).
  • turbo molecular pump 1 has a plurality of moving blade rows 8 formed in the axial direction.
  • the shaft 7 is a rotating shaft (rotor shaft) of the cylindrical member.
  • a rotor portion 4 is attached to the upper end of the shaft 7 by a plurality of bolts 10.
  • a motor part 11 for rotating the shaft 7 is arranged! /
  • the shaft 7 is arranged in the radial direction on the intake port 5 side and the exhaust port 6 side of the motor unit 11.
  • a magnetic bearing portion 12 and a magnetic bearing portion 13 for supporting the shaft are provided.
  • a magnetic bearing portion 14 for supporting the shaft 7 in the axial direction (thrust direction) is provided at the lower end of the shaft 7.
  • the shaft 7 is supported in a non-contact manner by a 5-axis control type magnetic bearing composed of magnetic bearing portions 12, 13, and 14.
  • Displacement sensors 15 and 16 are formed in the vicinity of the magnetic bearing portions 12 and 13, respectively, so that the radial displacement of the shaft 7 can be detected.
  • a displacement sensor 17 is formed at the lower end of the shaft 7 so that the axial displacement of the shaft 7 can be detected. I'm getting ready.
  • a stator portion is formed on the inner peripheral side of the casing 2.
  • This stator part includes a stationary blade row 18 provided on the intake port 5 side (turbomolecular pump part T), and a thread groove spacer 19 provided on the exhaust port 6 side (thread groove type pump part S). It is composed of
  • the stationary blade row 18 is composed of blades that are inclined at a predetermined angle from a plane perpendicular to the axis of the shaft 7 and extend from the inner peripheral surface of the casing 2 toward the shaft 7.
  • the stationary blade rows 18 are formed in a plurality of stages alternately in the axial direction with the moving blade rows 8.
  • the stationary blade rows 18 of each stage are separated from each other by a cylindrical spacer 20.
  • the thread groove spacer 19 is a cylindrical member in which a spiral groove is formed on the inner peripheral surface.
  • the inner peripheral surface of the thread groove spacer 19 faces the outer peripheral surface of the cylindrical member 9 with a predetermined clearance (gap) therebetween.
  • the direction of the spiral groove formed in the thread groove spacer 19 is the direction toward the exhaust port 6 when the gas is transported through the spiral groove in the rotational direction of the rotor portion 4.
  • the depth of the spiral groove becomes shallower as it approaches the exhaust port 6.
  • the gas transported through the spiral groove is compressed as it approaches the exhaust port 6.
  • stator portions are made of metal such as stainless steel or aluminum alloy.
  • the base 3 and the casing 2 constitute an exterior body of the turbo molecular pump 1.
  • a stator column 21 having a cylindrical shape is attached concentrically with the rotation axis of the rotor.
  • a back cover 22 is attached to the bottom of the base 3 (the opening of the stator column 21).
  • the turbo molecular pump 1 according to the present embodiment is provided with a control device for controlling the turbo molecular pump 1 as shown in FIG.
  • the rotor section 4 rotates at a high speed, and the blades of the moving blade row 8 and the stationary blade row 18 receive a process gas that has been heated to high temperature by compression heat or the like. In response to the heat of compression, the blade temperature of the moving blade row 8 and the stationary blade row 18 rises.
  • turbo molecular pump 1 is heated by heat generated from the motor unit 11 and becomes a high temperature state.
  • the turbo molecular pump 1 is operated by the collision heat (compression heat) of gas molecules and the motor unit 11. It is in a high temperature state due to heat generation.
  • a cooling pipe 26 is embedded in the base 3 in order to cool the turbo molecular pump 1 in a high temperature state.
  • the cooling pipe 26 is made of a tubular (tubular) member.
  • the cooling pipe 26 is a member that cools the periphery of the cooling pipe 26 by flowing a cooling medium, which is a heat medium, into the cooling pipe 26 so that the cooling medium absorbs heat.
  • the cooling pipe 26 described above is composed of a member having a low thermal resistance, a member, that is, a member having a high thermal conductivity, and a member such as copper or stainless steel.
  • the coolant flowing through the cooling pipe 26, that is, the fluid for cooling the object may be a liquid or a gas.
  • the liquid coolant for example, water, a calcium chloride aqueous solution, an ethylene glycol aqueous solution, or the like can be used.
  • ammonia, methane, ethane, halogen, helium gas, carbon dioxide gas, air, etc. can be used as the gas coolant.
  • the position of the force cooling pipe 26 in which the cooling pipe 26 is disposed on the base 3 is not limited to this.
  • it may be provided so as to be directly embedded in the stator column 21 and the back cover 22.
  • the turbo molecular pump 1 having such a configuration is a vacuum pump for performing an exhaust process on a vacuum vessel, for example, a process chamber provided in a semiconductor manufacturing apparatus in which the inside is kept in a high vacuum state. It is used as
  • particles (fine particles) made of reaction products are generated during reaction of a process gas.
  • particles generated in the process chamber that includes only the gas in the process chamber are also taken in from the intake port 5.
  • particles taken in from the intake port 5 collide with the rotating blade 28 rotating at high speed inside the turbo molecular pump 1, they are bounced back to the process chamber side, that is, flow back from the intake port 5 to the process chamber side. End up.
  • Such particles flowing back from the turbo molecular pump 1 may cause contamination inside the process chamber.
  • the rotary blade 28 is processed so as to suppress the backflow of the particles taken in from the intake port 5 to the upstream region.
  • FIG. 2 is a developed view schematically showing a part of the moving blade row 8 in the turbo molecular pump 1 according to the present embodiment.
  • the rotating blade 28 has a corner formed by a surface 28b facing the upstream direction of the gas transferred from the intake port 5 to the exhaust port 6 and a surface 28c facing the downstream direction of the gas. Then, the chamfered surface 28a is formed by chamfering!
  • the chamfered surface 28a is formed in parallel with the axial direction of the shaft 7, that is, in parallel with the rotation axis.
  • the chamfering process is, for example, a knife edge portion such as a corner formed by the surfaces 28b and 28c of the rotating blade 28 in order to prevent injury and reduce burrs when the turbo molecular pump 1 is assembled.
  • the process which cuts a ridge angle a little is shown.
  • the turbo molecular pump 1 it is specified by the interval between the adjacent rotating blades 28, the moving speed of the rotating blades 28 (rotating speed of the moving blade row 8), the moving speed of particles, and the like.
  • the formation region of the chamfered surface 28a of the rotary blade 28 is set based on the particle collision possible region L (hereinafter referred to as the collision possible region).
  • the amount of bracing in the chamfering process of the corner portion formed by the surfaces 28b and 28c of the rotary blade 28 is set.
  • FIG. 3 is an explanatory diagram for explaining a method of calculating the collision possible region L.
  • the angular velocity of the moving blade row 8 is 2830 rad / s (450 rotations per second)
  • the radius of the rotating blade 28 is 0.15 m.
  • the interval between the blades 28 shall be 0 ⁇ 03m.
  • the moving speed of the particle P that is, the falling speed VI is calculated as follows based on the law of conservation of energy. However, the gravitational acceleration is assumed to be 9.8 [m / s2].
  • the collision possible area L is calculated as follows.
  • Collision possible region L Spacing blade interval X (falling speed VI / rotating speed V2)
  • the chamfered surface 28a of the rotary blade is formed in the range of the collision possible region L and is not formed beyond the range of the collision possible region L! / As you can see, the amount of chamfering is set!
  • the chamfered surface 28a is provided in the particle collision-possible region L in the rotating blade 28 in consideration of the path of incidence (entrance) of particles to the rotating blade 28.
  • the chamfered surface 28a of the rotary blade 28 is formed in parallel with the rotation axis.
  • the direction of the chamfered surface 28a is not limited to this, and the colliding particle is moved upstream. It suffices to face in a direction that does not bounce back.
  • the chamfered surface 28a of the rotary blade 28 may be formed so as to face the downstream direction of the gas.
  • a casing for forming a gas flow path from the intake port 5 to the exhaust port 6 is formed.
  • a backflow preventing surface facing the downstream direction of the gas, that is, a trap for sending the colliding particles to the exhaust port 6 side is formed.
  • Fig. 4 is an enlarged view of the rupture part A in Fig. 1.
  • a cross section V is formed on the inner peripheral wall surface of the casing 2 in the vicinity of the intake port 5 and the inner peripheral wall surface (inner side surface) of the spacer 20 disposed in the vicinity of the intake port 5.
  • a letter-shaped groove 30 extends along the circumferential direction.
  • the groove 30 has a side surface (backflow prevention surface) provided on the intake port 5 side among the V-shaped side surfaces, and is provided on the exhaust port 6 side, that is, on the downstream side. It is formed to face the direction.
  • the side surface provided on the exhaust port 6 side is formed so as to face the intake port 5 side, that is, the upstream direction.
  • the groove 30 is provided only on the inner peripheral wall surface of the casing 2 in the vicinity of the intake port 5 and on the inner peripheral wall surface of the spacer 20 disposed in the vicinity of the intake port 5. , The force forming part of the groove 30 is not limited to this! /.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'un des buts de l'invention est d'empêcher un bon écoulement de retour des particules dans une région en amont d'une ouverture d'entrée, sans impliquer une chute significative de la performance d'évacuation des gaz. Une face chanfreinée (28a) est formée sur une aube rotative (28) d'une pompe turbomoléculaire en chanfreinant une partie de coin formée par une surface (28b), dirigée vers la direction vers l'amont du gaz transféré de l'ouverture d'entrée (5) à une ouverture d'évacuation (6), et par une surface (28c) dirigée vers la direction vers l'aval du gaz. La face chanfreinée (28a) est formée en parallèle à la direction axiale d'un arbre (7). Dans la pompe turbomoléculaire (1), la région où la face chanfreinée (28a) de l'aube rotative (28) est formée, est déterminée sur la base de l'intervalle d'aubes rotatives adjacentes (28), de la vitesse de déplacement de l'aube rotative (28) et d'une région L avec laquelle des particules peuvent entrées en collision et qui est spécifiée par la vitesse de déplacement etc. des particules. En d'autres termes, la quantité de coupe dans le chanfreinage de la partie de coin formée par la face (28b) et la face (28c) de l'aube rotative (28) est déterminée sur la base de la région L avec laquelle les particules peuvent entrer en collision.
PCT/JP2007/068070 2006-11-30 2007-09-18 Pompe à vide WO2008065798A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008546901A JP5463037B2 (ja) 2006-11-30 2007-09-18 真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-322766 2006-11-30
JP2006322766 2006-11-30

Publications (1)

Publication Number Publication Date
WO2008065798A1 true WO2008065798A1 (fr) 2008-06-05

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Family Applications (1)

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PCT/JP2007/068070 WO2008065798A1 (fr) 2006-11-30 2007-09-18 Pompe à vide

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JP (1) JP5463037B2 (fr)
WO (1) WO2008065798A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017104541A1 (fr) * 2015-12-15 2017-06-22 エドワーズ株式会社 Pompe à vide et pale rotative et mécanisme de réflexion montés sur une pompe à vide
JP2017110627A (ja) * 2015-12-15 2017-06-22 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
WO2019082706A1 (fr) * 2017-10-27 2019-05-02 エドワーズ株式会社 Pompe à vide, rotor, ailette de rotor et boîtier
EP3604820A4 (fr) * 2017-03-23 2020-12-23 Edwards Japan Limited Pompe à vide, composant de pale et rotor destinés à être utilisés dans une pompe à vide et pale fixe
GB2612781A (en) * 2021-11-10 2023-05-17 Edwards Ltd Turbomolecular pump bladed disc

Families Citing this family (1)

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CN110382877B (zh) 2017-03-23 2022-01-14 埃地沃兹日本有限公司 真空泵和用于该真空泵的叶片零件及转子以及固定的叶片

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JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump
JPS6125993A (ja) * 1984-07-13 1986-02-05 Ulvac Corp タ−ボ分子ポンプ
JP2000161285A (ja) * 1998-11-24 2000-06-13 Seiko Seiki Co Ltd ターボ分子ポンプ及び真空装置
JP2004019493A (ja) * 2002-06-13 2004-01-22 Fujitsu Ltd 排気装置
JP2006307823A (ja) * 2005-03-31 2006-11-09 Shimadzu Corp ターボ分子ポンプ

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump
JPS6125993A (ja) * 1984-07-13 1986-02-05 Ulvac Corp タ−ボ分子ポンプ
JP2000161285A (ja) * 1998-11-24 2000-06-13 Seiko Seiki Co Ltd ターボ分子ポンプ及び真空装置
JP2004019493A (ja) * 2002-06-13 2004-01-22 Fujitsu Ltd 排気装置
JP2006307823A (ja) * 2005-03-31 2006-11-09 Shimadzu Corp ターボ分子ポンプ

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017110627A (ja) * 2015-12-15 2017-06-22 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
CN108291552A (zh) * 2015-12-15 2018-07-17 埃地沃兹日本有限公司 真空泵及搭载于该真空泵的旋转翼、反射机构
US20180363662A1 (en) * 2015-12-15 2018-12-20 Edwards Japan Limited Vacuum pump, and rotor blade and reflection mechanism mounted in vacuum pump
WO2017104541A1 (fr) * 2015-12-15 2017-06-22 エドワーズ株式会社 Pompe à vide et pale rotative et mécanisme de réflexion montés sur une pompe à vide
EP3392508A4 (fr) * 2015-12-15 2019-08-07 Edwards Japan Limited Pompe à vide et pale rotative et mécanisme de réflexion montés sur une pompe à vide
US11009029B2 (en) 2015-12-15 2021-05-18 Edwards Japan Limited Vacuum pump, and rotor blade and reflection mechanism mounted in vacuum pump
EP3604820A4 (fr) * 2017-03-23 2020-12-23 Edwards Japan Limited Pompe à vide, composant de pale et rotor destinés à être utilisés dans une pompe à vide et pale fixe
US11655830B2 (en) 2017-03-23 2023-05-23 Edwards Japan Limited Vacuum pump, and blade component, rotor, and stationary blade used therein
WO2019082706A1 (fr) * 2017-10-27 2019-05-02 エドワーズ株式会社 Pompe à vide, rotor, ailette de rotor et boîtier
CN111183291A (zh) * 2017-10-27 2020-05-19 埃地沃兹日本有限公司 真空泵、转子、转子翅片及壳
CN111183291B (zh) * 2017-10-27 2022-01-14 埃地沃兹日本有限公司 真空泵、转子、转子翅片及壳
US11408437B2 (en) 2017-10-27 2022-08-09 Edwards Japan Limited Vacuum pump, rotor, rotor fin, and casing
JP2019082120A (ja) * 2017-10-27 2019-05-30 エドワーズ株式会社 真空ポンプ、ロータ、ロータフィン、およびケーシング
GB2612781A (en) * 2021-11-10 2023-05-17 Edwards Ltd Turbomolecular pump bladed disc
WO2023084200A1 (fr) * 2021-11-10 2023-05-19 Edwards Limited Disque à aubes de pompe turbomoléculaire
GB2612781B (en) * 2021-11-10 2024-04-10 Edwards Ltd Turbomolecular pump bladed disc

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