JPS5791396A - Rotary cylinder type molecular pump - Google Patents
Rotary cylinder type molecular pumpInfo
- Publication number
- JPS5791396A JPS5791396A JP16665480A JP16665480A JPS5791396A JP S5791396 A JPS5791396 A JP S5791396A JP 16665480 A JP16665480 A JP 16665480A JP 16665480 A JP16665480 A JP 16665480A JP S5791396 A JPS5791396 A JP S5791396A
- Authority
- JP
- Japan
- Prior art keywords
- molecular pump
- screw groove
- high speed
- speed range
- low speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To aim at reducing a power loss in a molecular pump of rotary cylinder type by longitudinally connecting a high speed screw groove and a low speed screw groove so that a molecular pump characteristic which is conventionally satisfactory in a high speed range, is made effective in a low speed range.
CONSTITUTION: The lead angle β21 of a screw groove 21 is larger than the lead angle β22 of a screw groove 22 longitudinally connected to the former with their groove widths and depths being remarkably different from each other. When a rotary member 1 rotates at a low speed, a molecular pump section having the screw groove 21 is operated more closely to an optimum drive point, thereby pressure reduction in a low pressure chamber 5 is mainly caused by this molecular pump section. When the rotary member 1 rotates at a high speed, the above-mentioned molecular pump section is operated far from the optimum drive point, and, the other molecular pump section having the screw groove 22 is, in stead, operated at the optimum drive point. With this arrangement, a molecular pump characteristic which is conventionally satisfactory in a high speed range, may be effective even in a low speed range, thereby to aim at reducing power necessary for accelerating the rotary member.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16665480A JPS5791396A (en) | 1980-11-28 | 1980-11-28 | Rotary cylinder type molecular pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16665480A JPS5791396A (en) | 1980-11-28 | 1980-11-28 | Rotary cylinder type molecular pump |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5791396A true JPS5791396A (en) | 1982-06-07 |
Family
ID=15835267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16665480A Pending JPS5791396A (en) | 1980-11-28 | 1980-11-28 | Rotary cylinder type molecular pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5791396A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6125993A (en) * | 1984-07-13 | 1986-02-05 | Ulvac Corp | Turbo-molecular pump |
CN104019042A (en) * | 2014-06-05 | 2014-09-03 | 核工业理化工程研究院 | Traction type molecular pump capable of being embedded in device |
-
1980
- 1980-11-28 JP JP16665480A patent/JPS5791396A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6125993A (en) * | 1984-07-13 | 1986-02-05 | Ulvac Corp | Turbo-molecular pump |
CN104019042A (en) * | 2014-06-05 | 2014-09-03 | 核工业理化工程研究院 | Traction type molecular pump capable of being embedded in device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5438439A (en) | Fuel injection for pump multiple injection | |
JPS5793602A (en) | Screw rotor | |
JPS5791396A (en) | Rotary cylinder type molecular pump | |
JPS52101345A (en) | Drive shaft | |
JPS52106065A (en) | Oil pressure type stepless gear reduction | |
JPS5214909A (en) | Oil cooling type screw compressor | |
JPS57105584A (en) | Screw fluid machine | |
JPS5420413A (en) | Method for switching dual purpose pump from shallow well pumping to deep well pumping | |
JPS54134806A (en) | Screw compressor capacity control mechanism | |
JPS5675994A (en) | Multieffect screw compressor | |
JPS5729856A (en) | Screw seal | |
JPS56592A (en) | Adjusting method of centrifugal pump ability | |
JPS5237209A (en) | Underwater displacement ventilator or compressor | |
JPS56151295A (en) | Geared pump or motor | |
JPS5650891A (en) | Marine propeller | |
JPS51129586A (en) | A fluid apparatus | |
JPS52129006A (en) | Rotor assembly method for screw type rotary machine | |
JPS53112510A (en) | Screw compressor | |
JPS5396515A (en) | Screw rotor | |
JPS55109798A (en) | Controller for preventing turbine action of centrifugal compressor | |
JPS53116516A (en) | Axial flow fan | |
JPS5494109A (en) | Screw compressor | |
JPS5389008A (en) | Automatic feed water pump eqipment | |
JPS5264001A (en) | Shaft thrust balancing system of high pressure multi-stage pump | |
JPS5759089A (en) | Vane pump |