JPS5791396A - Rotary cylinder type molecular pump - Google Patents

Rotary cylinder type molecular pump

Info

Publication number
JPS5791396A
JPS5791396A JP16665480A JP16665480A JPS5791396A JP S5791396 A JPS5791396 A JP S5791396A JP 16665480 A JP16665480 A JP 16665480A JP 16665480 A JP16665480 A JP 16665480A JP S5791396 A JPS5791396 A JP S5791396A
Authority
JP
Japan
Prior art keywords
molecular pump
screw groove
high speed
speed range
low speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16665480A
Other languages
Japanese (ja)
Inventor
Keiji Yoshimura
Katsuhiro Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP16665480A priority Critical patent/JPS5791396A/en
Publication of JPS5791396A publication Critical patent/JPS5791396A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To aim at reducing a power loss in a molecular pump of rotary cylinder type by longitudinally connecting a high speed screw groove and a low speed screw groove so that a molecular pump characteristic which is conventionally satisfactory in a high speed range, is made effective in a low speed range.
CONSTITUTION: The lead angle β21 of a screw groove 21 is larger than the lead angle β22 of a screw groove 22 longitudinally connected to the former with their groove widths and depths being remarkably different from each other. When a rotary member 1 rotates at a low speed, a molecular pump section having the screw groove 21 is operated more closely to an optimum drive point, thereby pressure reduction in a low pressure chamber 5 is mainly caused by this molecular pump section. When the rotary member 1 rotates at a high speed, the above-mentioned molecular pump section is operated far from the optimum drive point, and, the other molecular pump section having the screw groove 22 is, in stead, operated at the optimum drive point. With this arrangement, a molecular pump characteristic which is conventionally satisfactory in a high speed range, may be effective even in a low speed range, thereby to aim at reducing power necessary for accelerating the rotary member.
COPYRIGHT: (C)1982,JPO&Japio
JP16665480A 1980-11-28 1980-11-28 Rotary cylinder type molecular pump Pending JPS5791396A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16665480A JPS5791396A (en) 1980-11-28 1980-11-28 Rotary cylinder type molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16665480A JPS5791396A (en) 1980-11-28 1980-11-28 Rotary cylinder type molecular pump

Publications (1)

Publication Number Publication Date
JPS5791396A true JPS5791396A (en) 1982-06-07

Family

ID=15835267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16665480A Pending JPS5791396A (en) 1980-11-28 1980-11-28 Rotary cylinder type molecular pump

Country Status (1)

Country Link
JP (1) JPS5791396A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6125993A (en) * 1984-07-13 1986-02-05 Ulvac Corp Turbo-molecular pump
CN104019042A (en) * 2014-06-05 2014-09-03 核工业理化工程研究院 Traction type molecular pump capable of being embedded in device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6125993A (en) * 1984-07-13 1986-02-05 Ulvac Corp Turbo-molecular pump
CN104019042A (en) * 2014-06-05 2014-09-03 核工业理化工程研究院 Traction type molecular pump capable of being embedded in device

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