JPS6125430B2 - - Google Patents

Info

Publication number
JPS6125430B2
JPS6125430B2 JP16891582A JP16891582A JPS6125430B2 JP S6125430 B2 JPS6125430 B2 JP S6125430B2 JP 16891582 A JP16891582 A JP 16891582A JP 16891582 A JP16891582 A JP 16891582A JP S6125430 B2 JPS6125430 B2 JP S6125430B2
Authority
JP
Japan
Prior art keywords
paint
substrate
spin coating
speed
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16891582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5959265A (ja
Inventor
Kiichi Watanuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16891582A priority Critical patent/JPS5959265A/ja
Publication of JPS5959265A publication Critical patent/JPS5959265A/ja
Publication of JPS6125430B2 publication Critical patent/JPS6125430B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP16891582A 1982-09-28 1982-09-28 スピンコ−テイング法 Granted JPS5959265A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16891582A JPS5959265A (ja) 1982-09-28 1982-09-28 スピンコ−テイング法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16891582A JPS5959265A (ja) 1982-09-28 1982-09-28 スピンコ−テイング法

Publications (2)

Publication Number Publication Date
JPS5959265A JPS5959265A (ja) 1984-04-05
JPS6125430B2 true JPS6125430B2 (enExample) 1986-06-16

Family

ID=15876913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16891582A Granted JPS5959265A (ja) 1982-09-28 1982-09-28 スピンコ−テイング法

Country Status (1)

Country Link
JP (1) JPS5959265A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0667502B2 (ja) * 1985-05-21 1994-08-31 ティーディーケイ株式会社 スピンナ−ヘツド
US4850299A (en) * 1988-05-24 1989-07-25 Merullo John G Semiconductor wafer coating apparatus with angular oscillation means
JP2543842B2 (ja) * 1995-07-31 1996-10-16 ティーディーケイ株式会社 スピンナ―ヘッド

Also Published As

Publication number Publication date
JPS5959265A (ja) 1984-04-05

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