JPS5959265A - スピンコ−テイング法 - Google Patents

スピンコ−テイング法

Info

Publication number
JPS5959265A
JPS5959265A JP16891582A JP16891582A JPS5959265A JP S5959265 A JPS5959265 A JP S5959265A JP 16891582 A JP16891582 A JP 16891582A JP 16891582 A JP16891582 A JP 16891582A JP S5959265 A JPS5959265 A JP S5959265A
Authority
JP
Japan
Prior art keywords
paint
spin coating
substrate
motor
spin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16891582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6125430B2 (enExample
Inventor
Kiichi Watanuki
綿貫　基一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16891582A priority Critical patent/JPS5959265A/ja
Publication of JPS5959265A publication Critical patent/JPS5959265A/ja
Publication of JPS6125430B2 publication Critical patent/JPS6125430B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP16891582A 1982-09-28 1982-09-28 スピンコ−テイング法 Granted JPS5959265A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16891582A JPS5959265A (ja) 1982-09-28 1982-09-28 スピンコ−テイング法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16891582A JPS5959265A (ja) 1982-09-28 1982-09-28 スピンコ−テイング法

Publications (2)

Publication Number Publication Date
JPS5959265A true JPS5959265A (ja) 1984-04-05
JPS6125430B2 JPS6125430B2 (enExample) 1986-06-16

Family

ID=15876913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16891582A Granted JPS5959265A (ja) 1982-09-28 1982-09-28 スピンコ−テイング法

Country Status (1)

Country Link
JP (1) JPS5959265A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61268378A (ja) * 1985-05-21 1986-11-27 Tdk Corp スピンナ−ヘツド
US4850299A (en) * 1988-05-24 1989-07-25 Merullo John G Semiconductor wafer coating apparatus with angular oscillation means
JPH08103717A (ja) * 1995-07-31 1996-04-23 Tdk Corp スピンナーヘッド

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61268378A (ja) * 1985-05-21 1986-11-27 Tdk Corp スピンナ−ヘツド
US4850299A (en) * 1988-05-24 1989-07-25 Merullo John G Semiconductor wafer coating apparatus with angular oscillation means
JPH08103717A (ja) * 1995-07-31 1996-04-23 Tdk Corp スピンナーヘッド

Also Published As

Publication number Publication date
JPS6125430B2 (enExample) 1986-06-16

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