JPS6125212B2 - - Google Patents

Info

Publication number
JPS6125212B2
JPS6125212B2 JP9766279A JP9766279A JPS6125212B2 JP S6125212 B2 JPS6125212 B2 JP S6125212B2 JP 9766279 A JP9766279 A JP 9766279A JP 9766279 A JP9766279 A JP 9766279A JP S6125212 B2 JPS6125212 B2 JP S6125212B2
Authority
JP
Japan
Prior art keywords
oxide film
gate
layer
drain
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9766279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5621334A (en
Inventor
Takashi Ito
Takao Nozaki
Hajime Ishikawa
Masaichi Shinoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9766279A priority Critical patent/JPS5621334A/ja
Publication of JPS5621334A publication Critical patent/JPS5621334A/ja
Publication of JPS6125212B2 publication Critical patent/JPS6125212B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP9766279A 1979-07-31 1979-07-31 Manufacture of semiconductor device Granted JPS5621334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9766279A JPS5621334A (en) 1979-07-31 1979-07-31 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9766279A JPS5621334A (en) 1979-07-31 1979-07-31 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5621334A JPS5621334A (en) 1981-02-27
JPS6125212B2 true JPS6125212B2 (cs) 1986-06-14

Family

ID=14198265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9766279A Granted JPS5621334A (en) 1979-07-31 1979-07-31 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5621334A (cs)

Also Published As

Publication number Publication date
JPS5621334A (en) 1981-02-27

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