JPS6124466B2 - - Google Patents

Info

Publication number
JPS6124466B2
JPS6124466B2 JP53070180A JP7018078A JPS6124466B2 JP S6124466 B2 JPS6124466 B2 JP S6124466B2 JP 53070180 A JP53070180 A JP 53070180A JP 7018078 A JP7018078 A JP 7018078A JP S6124466 B2 JPS6124466 B2 JP S6124466B2
Authority
JP
Japan
Prior art keywords
thin film
discharge
support
substrate
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53070180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54160568A (en
Inventor
Tatsuo Asamaki
Aoshi Horiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP7018078A priority Critical patent/JPS54160568A/ja
Publication of JPS54160568A publication Critical patent/JPS54160568A/ja
Publication of JPS6124466B2 publication Critical patent/JPS6124466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
JP7018078A 1978-06-09 1978-06-09 Thin film forming equipment for discharge chemical reaction Granted JPS54160568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7018078A JPS54160568A (en) 1978-06-09 1978-06-09 Thin film forming equipment for discharge chemical reaction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7018078A JPS54160568A (en) 1978-06-09 1978-06-09 Thin film forming equipment for discharge chemical reaction

Publications (2)

Publication Number Publication Date
JPS54160568A JPS54160568A (en) 1979-12-19
JPS6124466B2 true JPS6124466B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-11

Family

ID=13424062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7018078A Granted JPS54160568A (en) 1978-06-09 1978-06-09 Thin film forming equipment for discharge chemical reaction

Country Status (1)

Country Link
JP (1) JPS54160568A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60215763A (ja) * 1984-04-09 1985-10-29 Nippon Steel Corp 被膜形成方法
WO2004072322A1 (ja) * 2003-02-12 2004-08-26 Toyoda Koki Kabushiki Kaisha アモルファス炭素膜の成膜方法および成膜装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU503228B2 (en) * 1975-07-28 1979-08-30 Rca Corp. Semiconductor device
US4066037A (en) * 1975-12-17 1978-01-03 Lfe Corportion Apparatus for depositing dielectric films using a glow discharge
JPS5391665A (en) * 1977-01-24 1978-08-11 Hitachi Ltd Plasma cvd device
US4226897A (en) * 1977-12-05 1980-10-07 Plasma Physics Corporation Method of forming semiconducting materials and barriers

Also Published As

Publication number Publication date
JPS54160568A (en) 1979-12-19

Similar Documents

Publication Publication Date Title
KR101044355B1 (ko) 가스 헤드 및 박막제조장치
JP3468859B2 (ja) 気相処理装置及び気相処理方法
JP6942188B2 (ja) 低温窒化ケイ素膜のための方法及び装置
US7763115B2 (en) Vacuum film-forming apparatus
US10770300B2 (en) Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity
KR100721504B1 (ko) 플라즈마 강화 원자층 증착 장치 및 이를 이용한 박막형성방법
JP2005089823A (ja) 成膜装置および成膜方法
JPH06314660A (ja) 薄膜形成法及びその装置
JP3682178B2 (ja) プラズマ処理方法及びプラズマ処理装置
JPS6187319A (ja) プラズマを用いた化学気相成膜装置
JPH05315268A (ja) プラズマｃｖｄ装置
JPS6124466B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH05239655A (ja) マイクロ波プラズマｃｖｄ法によるダイヤモンド膜合成装置
JPH0578851A (ja) 化学蒸着法によつてダイヤモンドを製造するための改良された装置とそれによつて得られる物品
JP2017218624A (ja) 硬質膜の成膜方法
JPS58163432A (ja) プラズマ化学気相成長装置
JPH07240379A (ja) 薄膜形成法及びその装置
JP2646582B2 (ja) プラズマｃｖｄ装置
JPH0578933B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0237758B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH04289172A (ja) 薄膜形成方法
JPH0449520B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0361371A (ja) 薄膜形成装置
JPH0532489A (ja) プラズマを用いるダイヤモンドの合成法
JPH08100264A (ja) 薄膜の形成方法およびその装置