JPS6124214A - Ｃｏ−Ｏ系薄膜型垂直磁気記録媒体の製造方法 - Google Patents
Ｃｏ−Ｏ系薄膜型垂直磁気記録媒体の製造方法Info
- Publication number
- JPS6124214A JPS6124214A JP14503884A JP14503884A JPS6124214A JP S6124214 A JPS6124214 A JP S6124214A JP 14503884 A JP14503884 A JP 14503884A JP 14503884 A JP14503884 A JP 14503884A JP S6124214 A JPS6124214 A JP S6124214A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- evaporation
- oxygen gas
- recording medium
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000010409 thin film Substances 0.000 title claims description 7
- 238000001704 evaporation Methods 0.000 claims abstract description 26
- 230000008020 evaporation Effects 0.000 claims abstract description 24
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 15
- 239000010941 cobalt Substances 0.000 claims abstract description 15
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910001882 dioxygen Inorganic materials 0.000 claims abstract description 12
- 239000001301 oxygen Substances 0.000 claims abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 abstract description 10
- 238000010894 electron beam technology Methods 0.000 abstract description 8
- -1 oxygen ions Chemical class 0.000 abstract description 5
- 239000007789 gas Substances 0.000 abstract description 2
- 229910020647 Co-O Inorganic materials 0.000 abstract 1
- 229910020704 Co—O Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 12
- 230000005415 magnetization Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14503884A JPS6124214A (ja) | 1984-07-12 | 1984-07-12 | Ｃｏ−Ｏ系薄膜型垂直磁気記録媒体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14503884A JPS6124214A (ja) | 1984-07-12 | 1984-07-12 | Ｃｏ−Ｏ系薄膜型垂直磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6124214A true JPS6124214A (ja) | 1986-02-01 |
| JPH0560248B2 JPH0560248B2 (enrdf_load_stackoverflow) | 1993-09-01 |
Family
ID=15375957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14503884A Granted JPS6124214A (ja) | 1984-07-12 | 1984-07-12 | Ｃｏ−Ｏ系薄膜型垂直磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6124214A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4861750A (en) * | 1987-04-20 | 1989-08-29 | Nissin Electric Co., Ltd. | Process for producing superconducting thin film |
| JPH01316455A (ja) * | 1988-03-26 | 1989-12-21 | Kawasaki Steel Corp | 一方向性珪素鋼板の磁気特性向上方法 |
| US4951604A (en) * | 1989-02-17 | 1990-08-28 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| JPH0317828A (ja) * | 1989-06-14 | 1991-01-25 | Matsushita Electric Ind Co Ltd | 金属薄膜型磁気記録媒体の製造方法 |
| US4987857A (en) * | 1988-06-21 | 1991-01-29 | Anelva Corporation | Vacuum deposition apparatus with dust collector electrode |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5812317A (ja) * | 1981-07-15 | 1983-01-24 | Sony Corp | 薄膜磁気媒体の製法 |
-
1984
- 1984-07-12 JP JP14503884A patent/JPS6124214A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5812317A (ja) * | 1981-07-15 | 1983-01-24 | Sony Corp | 薄膜磁気媒体の製法 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4861750A (en) * | 1987-04-20 | 1989-08-29 | Nissin Electric Co., Ltd. | Process for producing superconducting thin film |
| JPH01316455A (ja) * | 1988-03-26 | 1989-12-21 | Kawasaki Steel Corp | 一方向性珪素鋼板の磁気特性向上方法 |
| US4987857A (en) * | 1988-06-21 | 1991-01-29 | Anelva Corporation | Vacuum deposition apparatus with dust collector electrode |
| US4951604A (en) * | 1989-02-17 | 1990-08-28 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| JPH0317828A (ja) * | 1989-06-14 | 1991-01-25 | Matsushita Electric Ind Co Ltd | 金属薄膜型磁気記録媒体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0560248B2 (enrdf_load_stackoverflow) | 1993-09-01 |