JPH043010B2 - - Google Patents
Info
- Publication number
- JPH043010B2 JPH043010B2 JP19948787A JP19948787A JPH043010B2 JP H043010 B2 JPH043010 B2 JP H043010B2 JP 19948787 A JP19948787 A JP 19948787A JP 19948787 A JP19948787 A JP 19948787A JP H043010 B2 JPH043010 B2 JP H043010B2
- Authority
- JP
- Japan
- Prior art keywords
- excited species
- magnetic recording
- excited
- generating means
- mixed gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 44
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 30
- 239000010409 thin film Substances 0.000 claims description 23
- 239000007789 gas Substances 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 15
- 229910052742 iron Inorganic materials 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 6
- 229910001882 dioxygen Inorganic materials 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 239000003302 ferromagnetic material Substances 0.000 claims description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 5
- 229910052753 mercury Inorganic materials 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 3
- -1 composed of iron Chemical compound 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- DOTMOQHOJINYBL-UHFFFAOYSA-N molecular nitrogen;molecular oxygen Chemical compound N#N.O=O DOTMOQHOJINYBL-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 19
- 238000001704 evaporation Methods 0.000 description 9
- 230000008020 evaporation Effects 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 8
- 230000005415 magnetization Effects 0.000 description 6
- 229910017052 cobalt Inorganic materials 0.000 description 5
- 239000010941 cobalt Substances 0.000 description 5
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000006249 magnetic particle Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19948787A JPS6443815A (en) | 1987-08-10 | 1987-08-10 | Apparatus for producing thin film type magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19948787A JPS6443815A (en) | 1987-08-10 | 1987-08-10 | Apparatus for producing thin film type magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6443815A JPS6443815A (en) | 1989-02-16 |
| JPH043010B2 true JPH043010B2 (enrdf_load_stackoverflow) | 1992-01-21 |
Family
ID=16408625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19948787A Granted JPS6443815A (en) | 1987-08-10 | 1987-08-10 | Apparatus for producing thin film type magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6443815A (enrdf_load_stackoverflow) |
-
1987
- 1987-08-10 JP JP19948787A patent/JPS6443815A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6443815A (en) | 1989-02-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS60221566A (ja) | 薄膜形成装置 | |
| JPS5845892B2 (ja) | スパツタ蒸着装置 | |
| JP3386175B2 (ja) | ガスクラスターイオン援用による化合物薄膜の形成方法 | |
| US6812164B2 (en) | Method and apparatus for ionization film formation | |
| Celotta et al. | Sources of polarized electrons | |
| JPS5812728B2 (ja) | ジキキロクバイタイノ セイホウ | |
| CN1623008A (zh) | 氮化钛膜的形成方法 | |
| JPH0917597A (ja) | プラズマ発生装置及び方法 | |
| JPH043010B2 (enrdf_load_stackoverflow) | ||
| US4869835A (en) | Ion source | |
| JPS6124214A (ja) | Ｃｏ−Ｏ系薄膜型垂直磁気記録媒体の製造方法 | |
| JPS62298027A (ja) | 薄膜型磁気記録媒体の製造方法 | |
| JP2529220B2 (ja) | 硫化物蛍光体膜の製造方法 | |
| JPS63251930A (ja) | 薄膜型磁気記録媒体の製造方法 | |
| JPS60246599A (ja) | 高密度・低電子温度の均質大容積プラズマ発生方法および装置 | |
| JPS6362872A (ja) | 薄膜形成方法 | |
| JPS61926A (ja) | 鉄系薄膜型磁気記録媒体の製造方法 | |
| Zschornack et al. | ECRIS/EBIS based low-energy ion implantation technologies | |
| JPS63251931A (ja) | 薄膜型磁気記録媒体の製造方法 | |
| JPH03253564A (ja) | スパッタリング装置 | |
| JPS60236113A (ja) | 磁気記録材料およびその製造方法 | |
| JPS5996261A (ja) | 薄膜作成装置 | |
| Fleck | Formaldehyde on the silver (111) surface: Dissociation and polymerization induced by ultraviolet photons and low-energy electrons | |
| JPH06264238A (ja) | イオンプレーティング装置及びイオンプレーティングによる蒸着膜の膜厚と組成分布を制御する方法 | |
| JPH07110800B2 (ja) | イオン化ガス供給ノズル |