JPS6443815A - Apparatus for producing thin film type magnetic recording medium - Google Patents

Apparatus for producing thin film type magnetic recording medium

Info

Publication number
JPS6443815A
JPS6443815A JP19948787A JP19948787A JPS6443815A JP S6443815 A JPS6443815 A JP S6443815A JP 19948787 A JP19948787 A JP 19948787A JP 19948787 A JP19948787 A JP 19948787A JP S6443815 A JPS6443815 A JP S6443815A
Authority
JP
Japan
Prior art keywords
excitating
species
gaseous mixture
electrons
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19948787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH043010B2 (enrdf_load_stackoverflow
Inventor
Yoshihiro Uno
Setsu Arikawa
Tetsuo Tatsuno
Hideyo Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP19948787A priority Critical patent/JPS6443815A/ja
Publication of JPS6443815A publication Critical patent/JPS6443815A/ja
Publication of JPH043010B2 publication Critical patent/JPH043010B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
JP19948787A 1987-08-10 1987-08-10 Apparatus for producing thin film type magnetic recording medium Granted JPS6443815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19948787A JPS6443815A (en) 1987-08-10 1987-08-10 Apparatus for producing thin film type magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19948787A JPS6443815A (en) 1987-08-10 1987-08-10 Apparatus for producing thin film type magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS6443815A true JPS6443815A (en) 1989-02-16
JPH043010B2 JPH043010B2 (enrdf_load_stackoverflow) 1992-01-21

Family

ID=16408625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19948787A Granted JPS6443815A (en) 1987-08-10 1987-08-10 Apparatus for producing thin film type magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS6443815A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH043010B2 (enrdf_load_stackoverflow) 1992-01-21

Similar Documents

Publication Publication Date Title
KR890013819A (ko) 플라즈마 스퍼터링을 이용한 박막 형성 장치 및 이온 소스
ATE158384T1 (de) Elektronzyklotronresonanz-ionentriebwerk
Wagatsuma et al. Emission spectroscopic studies of Grimm-type glow discharge plasma with argon-helium gas mixtures
Dondes et al. A spectroscopic study of alpha-ray-induced luminescence in gases: part i
US4661710A (en) Negative ion source
GB1101293A (en) High output duoplasmatron-type ion source
JPS6443815A (en) Apparatus for producing thin film type magnetic recording medium
Celotta et al. Sources of polarized electrons
GB862835A (en) A device for producing energetic ions
JPS5773178A (en) Production of oxide
GB1100629A (en) Improvements in or relating to electric gas-discharge torches
Bittner Production of Doubly Charged Helium Ions
GB544326A (en) Improvements in or relating to a method and apparatus for electrically heating materials
JPS568816A (en) Manufacture of amorphous silicon film
Flinta Pulsed high-intensity ion source: Part I
JPS5668932A (en) Manufacture of magnetic recording medium
JP2879342B2 (ja) 電子ビーム励起イオン源
JPS57138060A (en) Manufacture for magnetic recording medium
Bruneteau et al. Investigation of two negative hydrogen and deuterium ion sources: Effect of the volume
JPS5887272A (ja) プレ−ナマグネトロンスパツタ装置
JPS6447028A (en) Plasma device
JPS62298027A (ja) 薄膜型磁気記録媒体の製造方法
Tanaka et al. Observation of collisional ionization electron spectra of van der Waals clusters with metastable He*(2 3 S) atoms: An evidence for autoionization from superexcited Ar clusters
JPS6453551A (en) Formation of thin film
JPS55134767A (en) Electronic impulse type ion engine