JPS61238383A - 恒温洗浄装置 - Google Patents

恒温洗浄装置

Info

Publication number
JPS61238383A
JPS61238383A JP8049785A JP8049785A JPS61238383A JP S61238383 A JPS61238383 A JP S61238383A JP 8049785 A JP8049785 A JP 8049785A JP 8049785 A JP8049785 A JP 8049785A JP S61238383 A JPS61238383 A JP S61238383A
Authority
JP
Japan
Prior art keywords
workpiece
temperature
liquid
arm
robot mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8049785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329473B2 (enrdf_load_stackoverflow
Inventor
花岡　浩
孝二 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP8049785A priority Critical patent/JPS61238383A/ja
Publication of JPS61238383A publication Critical patent/JPS61238383A/ja
Publication of JPH0329473B2 publication Critical patent/JPH0329473B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
JP8049785A 1985-04-16 1985-04-16 恒温洗浄装置 Granted JPS61238383A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8049785A JPS61238383A (ja) 1985-04-16 1985-04-16 恒温洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8049785A JPS61238383A (ja) 1985-04-16 1985-04-16 恒温洗浄装置

Publications (2)

Publication Number Publication Date
JPS61238383A true JPS61238383A (ja) 1986-10-23
JPH0329473B2 JPH0329473B2 (enrdf_load_stackoverflow) 1991-04-24

Family

ID=13719941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8049785A Granted JPS61238383A (ja) 1985-04-16 1985-04-16 恒温洗浄装置

Country Status (1)

Country Link
JP (1) JPS61238383A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461975A (ja) * 1990-06-26 1992-02-27 Makino Milling Mach Co Ltd ワーク洗浄装置
JP2013104449A (ja) * 2011-11-10 2013-05-30 Toshiba Mach Co Ltd 静圧空気軸受スピンドル装置およびこれを用いた工作機械

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3497135B2 (ja) * 1998-08-28 2004-02-16 株式会社ミツトヨ 被測定ワークの自動洗浄装置及び自動洗浄装置を備えた自動生産システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544780A (en) * 1978-09-27 1980-03-29 Toshiba Corp Cleaning device for semiconductor wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544780A (en) * 1978-09-27 1980-03-29 Toshiba Corp Cleaning device for semiconductor wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461975A (ja) * 1990-06-26 1992-02-27 Makino Milling Mach Co Ltd ワーク洗浄装置
JP2013104449A (ja) * 2011-11-10 2013-05-30 Toshiba Mach Co Ltd 静圧空気軸受スピンドル装置およびこれを用いた工作機械

Also Published As

Publication number Publication date
JPH0329473B2 (enrdf_load_stackoverflow) 1991-04-24

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