JPS61231197A - エレクトロクロミック素子に用いる酸化タングステンと酸化モリブデンの混合被膜の製造方法 - Google Patents
エレクトロクロミック素子に用いる酸化タングステンと酸化モリブデンの混合被膜の製造方法Info
- Publication number
- JPS61231197A JPS61231197A JP60070293A JP7029385A JPS61231197A JP S61231197 A JPS61231197 A JP S61231197A JP 60070293 A JP60070293 A JP 60070293A JP 7029385 A JP7029385 A JP 7029385A JP S61231197 A JPS61231197 A JP S61231197A
- Authority
- JP
- Japan
- Prior art keywords
- film
- mixed
- acid
- substrate
- tungstic acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- POZJWRRDBOEZOO-UHFFFAOYSA-N [Mo]=O.[W]=O Chemical compound [Mo]=O.[W]=O POZJWRRDBOEZOO-UHFFFAOYSA-N 0.000 title abstract 2
- VLAPMBHFAWRUQP-UHFFFAOYSA-L molybdic acid Chemical compound O[Mo](O)(=O)=O VLAPMBHFAWRUQP-UHFFFAOYSA-L 0.000 claims abstract description 24
- CMPGARWFYBADJI-UHFFFAOYSA-L tungstic acid Chemical compound O[W](O)(=O)=O CMPGARWFYBADJI-UHFFFAOYSA-L 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 239000000084 colloidal system Substances 0.000 claims abstract description 8
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 16
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 16
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 15
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 15
- 239000011259 mixed solution Substances 0.000 claims description 13
- 230000008021 deposition Effects 0.000 claims description 8
- 239000010408 film Substances 0.000 abstract description 36
- 239000000203 mixture Substances 0.000 abstract description 11
- MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 abstract description 7
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 abstract description 3
- 239000003729 cation exchange resin Substances 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 abstract description 3
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 abstract description 3
- 238000005342 ion exchange Methods 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 17
- 239000007864 aqueous solution Substances 0.000 description 11
- 238000000151 deposition Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000000862 absorption spectrum Methods 0.000 description 5
- 238000010304 firing Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000032683 aging Effects 0.000 description 4
- 229910052700 potassium Inorganic materials 0.000 description 4
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- 238000004040 coloring Methods 0.000 description 3
- AAQNGTNRWPXMPB-UHFFFAOYSA-N dipotassium;dioxido(dioxo)tungsten Chemical compound [K+].[K+].[O-][W]([O-])(=O)=O AAQNGTNRWPXMPB-UHFFFAOYSA-N 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 239000011591 potassium Substances 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- -1 hydrogen ions Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Electroplating Methods And Accessories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60070293A JPS61231197A (ja) | 1985-04-03 | 1985-04-03 | エレクトロクロミック素子に用いる酸化タングステンと酸化モリブデンの混合被膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60070293A JPS61231197A (ja) | 1985-04-03 | 1985-04-03 | エレクトロクロミック素子に用いる酸化タングステンと酸化モリブデンの混合被膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61231197A true JPS61231197A (ja) | 1986-10-15 |
| JPH058277B2 JPH058277B2 (enrdf_load_stackoverflow) | 1993-02-01 |
Family
ID=13427277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60070293A Granted JPS61231197A (ja) | 1985-04-03 | 1985-04-03 | エレクトロクロミック素子に用いる酸化タングステンと酸化モリブデンの混合被膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61231197A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108914183A (zh) * | 2018-07-09 | 2018-11-30 | 中国科学院上海硅酸盐研究所 | 钼掺杂非晶三氧化钨电致变色薄膜及其电化学沉积方法和应用 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411786A (en) * | 1977-06-28 | 1979-01-29 | Mitsubishi Electric Corp | Peak detecting system of spectra |
-
1985
- 1985-04-03 JP JP60070293A patent/JPS61231197A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411786A (en) * | 1977-06-28 | 1979-01-29 | Mitsubishi Electric Corp | Peak detecting system of spectra |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108914183A (zh) * | 2018-07-09 | 2018-11-30 | 中国科学院上海硅酸盐研究所 | 钼掺杂非晶三氧化钨电致变色薄膜及其电化学沉积方法和应用 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058277B2 (enrdf_load_stackoverflow) | 1993-02-01 |
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